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Laser Annealing

Case Study Excimer ELA 2018 English.pdf

Case Study Excimer ELA 2018 English.pdf

www.coherent.com | tech.sales@coherent.com | 800-527-3786 | 408-764-4983 Case Study: Excimer Laser Annealing for Brilliant AMOLED Displays Excimer laser annealing is key to mass production of polysilicon substrates for high-performance mobile displays. Vyper/LineBeam-technology supplies the global…

LineBeam systems

LineBeam systems

…System 308 nm excimer laser annealing enables market growth of faster, brighter, thinner and more lightweight AM-LCD and AM-OLED flat panel devices relying on high electron mobility. Datasheet LineBeam Applications Application Process Material Excimer Laser Annealing Surface Modification…

ILS Annealing.PDF

…This high
temperature would damage standard glass substrates, and
therefore necessitates the use of expensive, heat-resistant
EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME
RAINER PÄTZEL AND RALPH DELMDAHL
Silicon annealing enables
advanced displays

VYPER Series Lasers

VYPER Series Lasers

…Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit…

LAMBDA SX Excimer Laser Series

LAMBDA SX Excimer Laser Series

…SX lasers are perfectly suited for applications ranging from microstructuring, advanced semiconductor packaging, manufacturing of high-temperature superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA).…

Microelectronics

Microelectronics

…enable stable performance of AMLCD and AMOLED displays. Coherent is the market leader for excimer lasers and UV optical systems that are the enabling components of the annealing system. Highest laser power of more than 1 kW and optimized line beams of up to 750 mm are used worldwide for the…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

coherent.com 27
VYPER
Very High-Power Excimer Lasers
The VYPER Series lasers are multiple beam very high-power excimer
lasers specially designed for Excimer Laser Annealing (ELA). The high
quality demand in high resolution mobile display manufacturing
requires high…

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

laser, engraves into the metal surface and creates a contrast. When using CW laser radiation, most steel, titanium and gold materials turn black creating an annealing contrast. Related Products AVIA NX RAPID NX HELIOS MATRIX QS DPSS Lasers DIAMOND C-Series Laser Marking Systems Marking Lasers Lasers

Tinsley Custom Optics

Tinsley Custom Optics

…flat, and free-form optical components to common spheres and aspheres. Datasheet Tinsley Custom Optics Applications Application Satellite Optics Laser Fusion Optics Electronics Astronomy Remote Sensing --> Precision Aspheric Optical Fabrication - Coherent also provides mirrors, lenses, etc.; and…

UV Processing Solutions

UV Processing Solutions

…VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). UV Processing Solutions Literature 2019 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End version…

Excimer Lasers

Excimer Lasers

…microprocessing. They are offered at 193 nm, 248 nm, and 308 nm. VYPER VYPER The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). Excimer Lasers and Applications Literature Excimer Catalog Related Materials Videos UVblade -…

Revolution

Revolution

…Ti:Sapphire Pumping Materials Processing Semiconductor Annealing Flow Visualization --> Features & Benefits The Revolution laser family from Coherent represents the state-of-the-art in high reliability, high energy, kilohertz, pulsed green lasers. All models share the same sealed monolithic…

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