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Laser Annealing

LAMBDA SX

LAMBDA SX

…nm) to 600 Watts (308 nm only). The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing (ELA), industrial scale Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO), micro structuring, and all other applications which require high UV laser throughput. Model Name Wavelength (nm) Max.…

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…beam quality, and for many years, these lasers were lamp-pumped. But the ever-increasing power and lifetime characteristics of laser diodes are causing these lasers to switch to diode pumping; i.e., DPSS lasers. Conversely, lower-power Q-switched DPSS lasers are often based on Nd:YVO4. These are…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

Excimer laser technology trends

Excimer laser technology trends

…excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

LineBeam

LineBeam

LineBeam System for excimer laser crystallization annealing applications. LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates was transferred into industrial production in the mid-1990s. This technique is…

COHR LAMBDASXseries 01-2016.pdf

COHR LAMBDASXseries 01-2016.pdf

…semiconductor packaging, manufacturing of High Temperature Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR.The E-series is specially designed for Excimer Laser Annealing (ELA). Superior Reliability & Performance www.Coherent.com/LAMBDASX_Series

VYPER

VYPER

…Material Excimer Laser Annealing Semiconductor --> Features & Benefits VYPER/TwinVYPER Key Feature Customer Benefit Multi-Kilowatt Stabilized Output Power Fast, large area processing at lowest costs per Watt ExiScope Software (optional) Onboard logging and evaluation of laser parameters PowerLok…

UV Processing Solutions

UV Processing Solutions

…Excimer Lasers and Applications Literature 2016 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End version UV Processing Solutions Wavelength (nm) Beam Geometry Approx. Beam Dimensions Approx. Energy Density Laser Options UV…

COHR MaterialsProcessingBrochure 0816revA 3.pdf

COHR MaterialsProcessingBrochure 0816revA 3.pdf

Display Manufacturing Laser Materials Processing Applications Annealing: Annealing is widely used to improve the characteristics of materials, in particular thin films, with applications extending from wafer scale to large substrates. Laser annealing can activate dopants for advanced CMOS circuitry,…

ILS Annealing.PDF

…temperature for this process is 600°C. This high temperature would damage standard glass substrates, and therefore necessitates the use of expensive, heat-resistant EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME RAINER PÄTZEL AND RALPH DELMDAHL Silicon annealing enables advanced displays

Revolution

Revolution

…Ti:Sapphire Pumping Materials Processing Semiconductor Annealing Flow Visualization --> Features & Benefits The Revolution laser family from Coherent represents the state-of-the-art in high reliability, high energy, kilohertz, pulsed green lasers. All models share the same sealed monolithic…

ILS Annealing.PDF

…temperature for this process is 600°C. This high temperature would damage standard glass substrates, and therefore necessitates the use of expensive, heat-resistant EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME RAINER PÄTZEL AND RALPH DELMDAHL Silicon annealing enables advanced displays

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