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COHR Whitepaper PLD Excimer 2018 10 English.pdf

COHR Whitepaper PLD Excimer 2018 10 English.pdf

A Coherent Whitepaper October 2018
www.Coherent.com tech.sales@coherent.com I (800) 527-3786 I (408) 764-4983 6
Based on the deposition rates achieved in the laboratory, a system such as this could produce 0.5 m2 of 1 µm
thick ta-C film in 60 minutes. The total cost per square meter…