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Lb1000

COHR LineBeam DS 0718 7.pdf

COHR LineBeam DS 0718 7.pdf

…1500
Wavelength (nm) 308
Line Length (mm) 750 1000 1300 1500
Beam Profile Type Top-hat beam along both axes
Depth of Focus (µm) ±150 ±120 ±120 ±120
LineBeam Performance
Example of LB1000 2D-beam profile, short and long axis cross sections in the substrate plane.

COHR LineBeam DS 1119 1.pdf

COHR LineBeam DS 1119 1.pdf

…1500
Beam Profile Type Top-hat beam along both axes
Depth of Focus (µm) ±150 ±120 ±120 ±120
LineBeam Performance
Example of LB1000 2D-beam profile, short and long axis cross sections in the substrate plane.
1 R&D-LineBeam systems with smaller format available on request.…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…1500
Wavelength (nm) 308
Line Length (mm) 750 1000 1300 1500
Beam Profile Type Top-hat beam along both axes
Depth of Focus (µm) ±150 ±120 ±120 ±120
LineBeam Performance
Example of LB1000 2D-beam profile, short and long axis cross sections in the substrate plane.

COHR ExcimerCatalog2020 final lr.pdf

COHR ExcimerCatalog2020 final lr.pdf

coherent.com 35
Excimer Lasers and UV Optical Systems LineBeam
LineBeam
LineBeam Performance
Example of LB1000 2D-beam profile, short and long axis cross sections in the substrate plane.
SPECIFICATIONS Mass Production LineBeam Systems1
Wavelength (nm) 308
Line…

COHR ExcimerCatalog2020 int 0320.pdf

COHR ExcimerCatalog2020 int 0320.pdf

coherent.com 35
Excimer Lasers and UV Optical Systems LineBeam
LineBeam
LineBeam Performance
Example of LB1000 2D-beam profile, short and long axis cross sections in the substrate plane.
SPECIFICATIONS Mass Production LineBeam Systems1
Wavelength (nm) 308
Line…