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Lb1000

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…1500
Wavelength (nm) 308
Line Length (mm) 750 1000 1300 1500
Beam Profile Type Top-hat beam along both axes
Depth of Focus (µm) ±150 ±120 ±120 ±120
LineBeam Performance
Example of LB1000 2D-beam profile, short and long axis cross sections in the substrate plane.

COHR LineBeam DS 0718 7.pdf

COHR LineBeam DS 0718 7.pdf

…1500
Wavelength (nm) 308
Line Length (mm) 750 1000 1300 1500
Beam Profile Type Top-hat beam along both axes
Depth of Focus (µm) ±150 ±120 ±120 ±120
LineBeam Performance
Example of LB1000 2D-beam profile, short and long axis cross sections in the substrate plane.