LEAP

…(W) LEAP 50A 193 200 250 50 LEAP 60A 193 150 400 60 LEAP 80K 248 125 650 80 LEAP 80C 308 125 650 80 LEAP 100K 248 100 1000 100 LEAP 100C 308 100 1000 100 LEAP 130K 248 200 650 130 LEAP 130C 308 200 650 130 LEAP 150K 248 150 1000 150 LEAP 150C 308 150 1000 150 LEAP 300K 248 300 1000 300 LEAP 300C…

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Excimer Lasers

…applications ranging from microstructuring, advanced semiconductor packaging, Pulsed Laser Deposition Laser Lift-Off (LLO) to high power UV LIDAR. LEAP LEAP LEAP excimer lasers deliver a unique combination of high duty-cycle output, outstanding reliability, and low cost of ownership. This makes them…

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COHR ExcimerCatalog2019.pdf

…Front View
ACCESSORIES Description
Part Number 376252
1136303
1320865
1320866
Low-Divergence Resonator Optics, 248 nm, LEAP K-Series
Transformer, 30 kVA, 190 to 480 VAC, LEAP 300C
Upgrade LEAP 80 to LEAP 130
Upgrade LEAP 100 to LEAP 150
LEAP

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COHR ExcimerCatalog2020 final lr.pdf

…Front View
ACCESSORIES Description
Part Number 376252
1136303
1320865
1320866
Low-Divergence Resonator Optics, 248 nm, LEAP K-Series
Transformer, 30 kVA, 190 to 480 VAC, LEAP 300C
Upgrade LEAP 80 to LEAP 130
Upgrade LEAP 100 to LEAP 150
LEAP

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COHR ExcimerCatalog2020 int 0320.pdf

…Front View
ACCESSORIES Description
Part Number 376252
1136303
1320865
1320866
Low-Divergence Resonator Optics, 248 nm, LEAP K-Series
Transformer, 30 kVA, 190 to 480 VAC, LEAP 300C
Upgrade LEAP 80 to LEAP 130
Upgrade LEAP 100 to LEAP 150
LEAP

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COHR Whitepaper PLD Excimer 2018 10 German.pdf

…764-4983 5
Coherent Excimerlaser LEAP
Excimerlaser der LEAP Serie sind verfügbar für die Wellenlängen 248 und 308 nm und finden zunehmend
ihren Einsatz in der Materialforschung sowie in industriellen PLD-Produktions-Systemen. Die LEAP Serie ist
über einen großen…

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COHR LEAPseries DS 0420 2.pdf

LEAP 150K 1 Joule at 150 Hz,
Dynamic Energy Range (typical data)
LEAP 150K 1 Joule at 150 Hz,
Energy Stability over 30 Mio. Pulses
TYPICAL PERFORMANCE DATA
LEAP Datasheet
0
1400
1.5
HV/kV
1.55 1.6 1.65 1.7 1.75 1.8
Energy (mJ)
200
400…

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28-29.indd

2020 2 29
www.industrysourcing.cn
Application Reports

TiNTi TaNTa

- 1

100mJ/cm2 50 nm/
1200 mJ/cm2 1000 nm/

RDL
/ (RDL) RDL/

/ (CMP)
CMP

CMP CMP

UBM
3D

10 µm
5 µm

2
Coherent LEAP 1.

300mm 10s

2.

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36-37.indd

2020 4 37
www.industrysourcing.cn

Laser Micromachining

(KrF)

(DUV) 248 nm

Fraunhofer ILT
LineBeam 155 Coherent
LEAP 150K KrF 248 nm
150W LineBeam 155 mm
×0.4 mm
5,500

ILT Matthias Trenn
"LineBeam

"
Coherent Ralph Delmdahl
…

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COHR LEAPseries DS 0518 9.pdf

LEAP Datasheet
SPECIFICATIONS LEAP
80K 130K
LEAP
80C 130C
LEAP
100K 150K
LEAP
100C 150C
LEAP
300C
Wavelength (nm) 248 308 248 308 308
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max.…

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COHR LEAPseries DS 0619 3.pdf

LEAP Datasheet
SPECIFICATIONS LEAP
80K 130K
LEAP
80C 130C
LEAP
100K 150K
LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max.…

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COHR LEAPseries DS 0819 5.pdf

LEAP Datasheet
SPECIFICATIONS LEAP
80K 130K
LEAP
80C 130C
LEAP
100K 150K
LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max.…

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