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Leap 150k

COHR LEAPseries DS 0518 9.pdf

COHR LEAPseries DS 0518 9.pdf

LEAP Datasheet
SPECIFICATIONS LEAP
80K 130K
LEAP
80C 130C
LEAP
100K 150K
LEAP
100C 150C
LEAP
300C
Wavelength (nm) 248 308 248 308 308
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max.…

36-37.indd

36-37.indd

…4 37
www.industrysourcing.cn

Laser Micromachining

(KrF)

(DUV) 248 nm

Fraunhofer ILT
LineBeam 155 Coherent
LEAP 150K KrF 248 nm
150W LineBeam 155 mm
×0.4 mm
5,500

ILT Matthias Trenn
"LineBeam

"
Coherent Ralph Delmdahl

COHR LEAPseries DS 0619 3.pdf

COHR LEAPseries DS 0619 3.pdf

LEAP Datasheet
SPECIFICATIONS LEAP
80K 130K
LEAP
80C 130C
LEAP
100K 150K
LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max.…

COHR LEAPseries DS 0819 5.pdf

COHR LEAPseries DS 0819 5.pdf

LEAP Datasheet
SPECIFICATIONS LEAP
80K 130K
LEAP
80C 130C
LEAP
100K 150K
LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max.…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

coherent.com 21
Excimer Lasers and UV Optical Systems LEAP
LEAP
SPECIFICATIONS LEAP
80K 130K
LEAP
80C 130C
LEAP
100K 150K
LEAP
100C 150C
LEAP
300C
Wavelength (nm) 248 308 248 308 308
Stabilized Energy Range (mJ) 550 to 650 550 to…

COHR LEAPseries DS 0420 2.pdf

COHR LEAPseries DS 0420 2.pdf

LEAP 150K 1 Joule at 150 Hz,
Dynamic Energy Range (typical data)
LEAP 150K 1 Joule at 150 Hz,
Energy Stability over 30 Mio. Pulses
TYPICAL PERFORMANCE DATA
LEAP Datasheet
0
1400
1.5
HV/kV
1.55 1.6 1.65 1.7 1.75 1.8
Energy (mJ)
200
400…

COHR LEAPseries DS 1119 1.pdf

COHR LEAPseries DS 1119 1.pdf

LEAP Datasheet
SPECIFICATIONS LEAP
80K 130K
LEAP
80C 130C
LEAP
100K 150K
LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max.…

COHR ExcimerCatalog2020 final lr.pdf

COHR ExcimerCatalog2020 final lr.pdf

coherent.com 21
Excimer Lasers and UV Optical Systems LEAP
LEAP
SPECIFICATIONS LEAP
80K 130K
LEAP
80C 130C
LEAP
100K 150K
LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to…

COHR ExcimerCatalog2020 int 0320.pdf

COHR ExcimerCatalog2020 int 0320.pdf

coherent.com 21
Excimer Lasers and UV Optical Systems LEAP
LEAP
SPECIFICATIONS LEAP
80K 130K
LEAP
80C 130C
LEAP
100K 150K
LEAP
100C 150C
LEAP
300C 300K
Wavelength (nm) 248 308 248 308 308 248
Stabilized Energy Range (mJ) 550 to…

CMM 12.6.indd

CMM 12.6.indd

…reasons that
the Fraunhofer ILT's Micro and
Nanostructuring Group opted for
the LineBeam 155. The system
combines Coherent's LEAP 150K KrF
excimer laser, which has a maximum
average output of 150 W at 248 nm,
and LineBeam optics, which deliver
a 155 mm x 0.4…