linewidth control are widely utilized. And
while other technologies, such as extreme
ultraviolet (EUV) lithography at 13 nm
will complement the excimer laser for the
most critical layers at 10 nm, the future
of the excimer laser still looks bright for
…an issue with this new, single-step dry process. Related Products LAMBDA SX LEAP Pulsed Laser Deposition Short and intense laser pulses provide unique benefits for many pulsed laser deposition applications. Pulsed laser deposition (PLD) is a laser-based technique used to grow high quality thin films…
…6-10 billion pulses.
3.2. Capitalizing on pulse energy
Sophisticated beam delivery architectures based on laser beam
splitting and scanning enable the formation of several parallel
plumes. Under the premise that the required excimer laser
fluence for each of the illumination…
linewidth, were not a perfect fit for the
core design of our lasers at that time.
After Lambda Physik was wholly acquired by Coherent in 2003, we started searching for other industrial applications that were better matched to the
unique high pulse energies of our…
…parallel streams of pulses down the same optical fiber without crosstalk. Real lasers are not perfectly monochromatic because several broadening mechanisms
widen the frequency (and energy) of the emitted photons. For example, free-running YAG lasers can have linewidths of hundreds of gigahertz,…
7 Valid for ultra power >75 mW.
9 Back connector not included in laser head length dimension.
10 Power consumption for the CX 355-250 is 600W.
Genesis CX STM-Series
High-Power Optically Pumped Semiconductor Lasers (OPSL)
…recently measured gravitational waves for the first time. The
LIGO team is locking the frequency
of your monolithic Mephisto lasers to
sub-Hz linewidths and stability.
But that's part of the attraction and
magic of laser science for me. A cutting
edge innovation soon…
…output wavelength and linewidth is not needed for materials processing.
The Zugspitze group acquired an industrial excimer from Coherent
* with pulse energies up to 1 Joule at
repetition rates up to 350 Hz. They then modified this laser to provide the narrow linewidth and
…a native pulsed UV laser technology
unite to the perfect carrier separation
tool. Excimer lasers uniquely provide
the necessary pulse energies and optical
performance characteristics to support
square centimeter scale processing areas with optimum beam geometry for
…2016 Laser 12 Image: Coherent Ultrashortpulse lasers are modern tools for high precision processing methods of metal, diamond, thin films and other materials. There are two basic mechanisms by which a laser can process a material. Photothermal interaction For most continuous wave and pulsed lasers…
Dimensions (L x W x H)
Laser Head6 250.1 x 138.0 x 50.8 mm (9.84 x 5.4 x 2.0 in.)
Cables (laser head to controller) 2m (6.5 ft.)
1 Optical parameters measured at the output plane of the laser head. Unless noted all parameters valid for the lifetime of the unit.
manager for Coherent, where he has worked
for seven years. He holds a Ph.D. in ultrafast
studies from Ohio State University; email:
The key elements in the manipulation of the
multiple ultrafast pulses for 2D electronic