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Lpxpro 210

COHR LPXproSeries DS 1016 1.pdf

COHR LPXproSeries DS 1016 1.pdf

…50 100 150 200 High Pulse Energy Excimer Lasers LPXpro Series LPXpro 220 F at 248 nm True specs: power specification with margin LPXpro 220 F at 193 nm and 5 Hz High pulse energy in deep UV System Specifications LPXpro 210 LPXpro 220 LPXpro 240 LPXpro 305 LPFpro 205 LPFpro 220 Wavelength1 (nm) Max.…

LPXpro series DSrevC

LPXpro series DSrevC

…Representative. Printed in the U.S.A. MC-007-05-0M08128Rev.D Copyright ©2012 Coherent, Inc. ISO 9001:2000 Registered Wavelength1 LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro (nm) 210 220 240 305 205 220 Max. Pulse Energy (mJ) 157 - - - - 50 40 up to 10 Hz 193 450 300 160 600 400 250 248 800 550 300…

LPXpro

LPXpro

…200 250 40 LPXpro 210 100 450 30 LPXpro 220 200 300 50 LPXpro 240 300 160 4 LPXpro 305 50 600 20 LPXpro 210 248 100 800 70 LPXpro 220 200 550 80 LPXpro 240 400 300 64 LPXpro 305 50 1100 40 LPXpro 210 308 100 500 45 LPXpro 220 200 400 55 LPXpro 305 50 700 30 LPXpro 210 351 100 400 20 LPXpro 220 200…

COHR LPXproSeries DS 1016 1.pdf

COHR LPXproSeries DS 1016 1.pdf

…50 100 150 200 High Pulse Energy Excimer Lasers LPXpro Series LPXpro 220 F at 248 nm True specs: power specification with margin LPXpro 220 F at 193 nm and 5 Hz High pulse energy in deep UV System Specifications LPXpro 210 LPXpro 220 LPXpro 240 LPXpro 305 LPFpro 205 LPFpro 220 Wavelength1 (nm) Max.…

LPXpro series DSrevC

LPXpro series DSrevC

…Representative. Printed in the U.S.A. MC-007-05-0M08128Rev.D Copyright ©2012 Coherent, Inc. ISO 9001:2000 Registered Wavelength1 LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro (nm) 210 220 240 305 205 220 Max. Pulse Energy (mJ) 157 - - - - 50 40 up to 10 Hz 193 450 300 160 600 400 250 248 800 550 300…

LPXpro series DSrevC

LPXpro series DSrevC

…Representative. Printed in the U.S.A. MC-007-05-0M08128Rev.D Copyright ©2012 Coherent, Inc. ISO 9001:2000 Registered Wavelength1 LPXpro LPXpro LPXpro LPXpro LPFpro LPFpro (nm) 210 220 240 305 205 220 Max. Pulse Energy (mJ) 157 - - - - 50 40 up to 10 Hz 193 450 300 160 600 400 250 248 800 550 300…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Wavelength Max. Energy Max. Repetition Rate LPXpro Series (nm) (mJ) (Hz) LPFpro 205 157 50 50 LPFpro 220 157 40 200 LPXpro 210 193 300 100 248 700 100 308 450 100 351 200 100 LPXpro 220 193 250 200 248 400 200 308 275 200 LPXpro 240 193 80 300 248 160 400 LPXpro 305 193 400 50 248 800 50 308 600 50…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Wavelength Max. Energy Max. Repetition Rate LPXpro Series (nm) (mJ) (Hz) LPFpro 205 157 50 50 LPFpro 220 157 40 200 LPXpro 210 193 300 100 248 700 100 308 450 100 351 200 100 LPXpro 220 193 250 200 248 400 200 308 275 200 LPXpro 240 193 80 300 248 160 400 LPXpro 305 193 400 50 248 800 50 308 600 50…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Wavelength Max. Energy Max. Repetition Rate LPXpro Series (nm) (mJ) (Hz) LPFpro 205 157 50 50 LPFpro 220 157 40 200 LPXpro 210 193 300 100 248 700 100 308 450 100 351 200 100 LPXpro 220 193 250 200 248 400 200 308 275 200 LPXpro 240 193 80 300 248 160 400 LPXpro 305 193 400 50 248 800 50 308 600 50…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Wavelength Max. Energy Max. Repetition Rate LPXpro Series (nm) (mJ) (Hz) LPFpro 205 157 50 50 LPFpro 220 157 40 200 LPXpro 210 193 300 100 248 700 100 308 450 100 351 200 100 LPXpro 220 193 250 200 248 400 200 308 275 200 LPXpro 240 193 80 300 248 160 400 LPXpro 305 193 400 50 248 800 50 308 600 50…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…Wavelength Max. Energy Max. Repetition Rate LPXpro Series (nm) (mJ) (Hz) LPFpro 205 157 50 50 LPFpro 220 157 40 200 LPXpro 210 193 300 100 248 700 100 308 450 100 351 200 100 LPXpro 220 193 250 200 248 400 200 308 275 200 LPXpro 240 193 80 300 248 160 400 LPXpro 305 193 400 50 248 800 50 308 600 50…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Wavelength Max. Energy Max. Repetition Rate LPXpro Series (nm) (mJ) (Hz) LPFpro 205 157 50 50 LPFpro 220 157 40 200 LPXpro 210 193 300 100 248 700 100 308 450 100 351 200 100 LPXpro 220 193 250 200 248 400 200 308 275 200 LPXpro 240 193 80 300 248 160 400 LPXpro 305 193 400 50 248 800 50 308 600 50…

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