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Related Categories: Silicon Annealing | 248 Nm | Leap Laser | Leap 150 | 351 Nm

Mio Pulse

COHR LEAPseries DS 0518 9.pdf

COHR LEAPseries DS 0518 9.pdf

Mio Pulses (n)
5 10 15 20 25
<0.5%
30
Energy Stability (,%)
0.5
1.0
1.5
2.0
2.5
LEAP 150K 1 Joule at 150 Hz,
Dynamic Energy Range (typical data)
LEAP 150K 1 Joule at 150 Hz,
Energy Stability over 30 Mio. Pulses
1 Max. pulse

COHR VYPER DS 0618 6.pdf

COHR VYPER DS 0618 6.pdf


Pulse Duration (FWHM, ns) 24 ±45 24 ±45 24 ±45
Beam Dimensions6 (FWHM, V x H, mm2) 35 ±4 x 14.5 ±35 35 ±4 x 14 .5 ±35 35 ±4 x 14.5 ±35
Beam Divergence (FWHM, V x H, mrad2) 4.5 x 1.35 4.5 x 1.35 4.5 x 1.35
Dynamic Gas Lifetime (at max. stabilized energy)
(mio. pulses)

COHR LEAPseries DS 0619 3.pdf

COHR LEAPseries DS 0619 3.pdf

Mio Pulses (n)
5 10 15 20 25
<0.5%
30
Energy Stability (,%)
0.5
1.0
1.5
2.0
2.5
LEAP 150K 1 Joule at 150 Hz,
Dynamic Energy Range (typical data)
LEAP 150K 1 Joule at 150 Hz,
Energy Stability over 30 Mio. Pulses
1 Max. pulse

COHR LEAPseries DS 0819 5.pdf

COHR LEAPseries DS 0819 5.pdf

Mio Pulses (n)
5 10 15 20 25
<0.5%
30
Energy Stability (,%)
0.5
1.0
1.5
2.0
2.5
LEAP 150K 1 Joule at 150 Hz,
Dynamic Energy Range (typical data)
LEAP 150K 1 Joule at 150 Hz,
Energy Stability over 30 Mio. Pulses
1 Max. pulse

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…Max. pulse energy 1100 mJ at 10 Hz.
0
1400
1.5
HV/kV
1.55 1.6 1.65 1.7 1.75 1.8
Energy (mJ)
200
400
600
800
1000
1200
LEAP 150K 1 Joule at 150 Hz,
Dynamic Energy Range (typical data)
0
3.0
0
Mio Pulses (n)

COHR LAMBDASX DS 0618 6.pdf

COHR LAMBDASX DS 0618 6.pdf

…%) 0 .45 1
Pulse Duration (FWHM) (ns) 24 ±4 24 ±4
Beam Dimensions2 (FWHM, V x H, mm2) 35 ±4 x 14.5 ±3 35 ±4 x 14.5 ±3
Beam Divergence (FWHM, V x H, mrad2) 4.5 x 1 4.5 x 1.5
Dynamic Gas Lifetime (at max. stabilized energy) (mio. pulses) 60 100
WEIGHT/UTILITIES/DIMENSIONS…

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