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Mocvd

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…sapphire, silicon carbide (SiC) or silicon. The vast majority of LED production today
utilizes sapphire wafer as the growth substrate for the MOCVD due to its small lattice mismatch
and relatively low cost. However, as a final carrier material it severely hampers the performance
of…