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New Fill Intervals

Excimer laser technology trends

Excimer laser technology trends

…static gas lifetime which is the time interval
between consecutive new fills accepting a 50% reduction of
the initial output energy before each new fill.
A static gas lifetime of over a month is typically achieved,
resulting in about 25 new fills per year which are easily covered…

Conference FBG Cohr in Goe 0916.pdf

Conference FBG Cohr in Goe 0916.pdf

…below. A single set of resonator windows was used in the
endurance measurement. A new gas fill was performed at each
maximum of the high voltage curve. Arrows indicate regular
optics cleaning intervals.
In order to extend the hands-off operation time of compact excimer lasers in…