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Oled Ela

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…large-scale OLED and LCD fabs
· Active control and observation
modules for reproducible annealing
results
· Line beam lengths scalable up
to Gen 10.5 panel size
APPLICATIONS
· Excimer Laser Annealing (ELA)
of polysilicon backplanes for
OLED and LCD

34706a cover.indd

34706a cover.indd

…ppi) for high end smart phones, and hold the potential
for deployment in tablet display and OLED TV manufacturing. Excimer based LTPS is also enabling a
new generation of flexible OLED displays which have already seen some implementation in leading
smart phones and wearables and…

Case Study Excimer ELA 2018 English.pdf

Case Study Excimer ELA 2018 English.pdf

…smartphone and tablet revolution has spurred the broad-scale use of polysilicon backplanes for razor-sharp mobile LCDs and for self-illuminating OLED displays up to the largest diagonal. The enabling production infrastructure has been created in the garb of the new Vyper/LineBeam-system for excimer…

Coherent

Coherent

…smartphone manufacturers, which have led to increased demand for LTPS LCD displays. Both
OLED and high definition LCD displays are manufactured with the use of our excimer laser annealing
(ELA) tools. Price competition at the panel manufacturer level is fierce. Given these dynamics,

COHR LineBeam DS 0718 7.pdf

COHR LineBeam DS 0718 7.pdf

…beam utilization · Proven performance in leading large-scale OLED and LCD fabs · Active control and observation modules for reproducible annealing results · Line beam lengths scalable up to Gen 10.5 panel size APPLICATIONS · Excimer Laser Annealing (ELA) of polysilicon backplanes for OLED and LCD

CMM 11.5.indd

CMM 11.5.indd

…LCD and OLED displays,
each subpixel of a micro-LED display
has to be addressed and individually
driven to brightness by the matrix
of thin-film transistors of the display
backplane. High mobility LTPS
backplanes are required for microLED displays, and ELA amorphous…

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…development for advanced display products is breathtaking. While large-scale investment in OLED display production is ongoing in Korea and China, there is already a new technology that may challenge LCD and OLED displays in some segments. Specifically, displays comprised of micro-LEDs (LED) are…

an rep 2018 workfile 02

an rep 2018 workfile 02

…fiscal 2018, Microelectronics sales increased $142.1 million, or 16%, compared to fiscal
2017 primarily due to higher shipments related to ELA tools used in the flat panel display market
including higher revenues from consumable parts as well as higher shipments related to semiconductor,…

32311a coverSinglesRR.indd

32311a coverSinglesRR.indd

…could only be produced on expensive special glass at high temperatures. However, excimer-based
processes, such as excimer laser annealing (``ELA'') have allowed high-volume production of
low-temperature polysilicon (``LTPS'') on conventional glass substrates. Our excimer lasers provide…

Laser Focus World - November 2017

Laser Focus World - November 2017

…transition to OLED
technology comprised of emissive pixels
without a backlight sets high demands on
TFT performance.
The a-Si layer is transformed into poly-Si by heating it with the excimer laser
in a process called excimer laser annealing (ELA; see Fig. 3). Specifically,…