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Related Categories: Llo | Wafer Inspection | Micro Led | Via Drilling | Leap300

Pld

Microelectronics

Microelectronics

…Although visible or IR laser beams have been used for PLD applications, UV beams are now most commonly employed. Among UV pulsed lasers, excimer lasers provide a variety of short wavelengths combined with energy levels that fit perfectly most PLD applications. High laser pulse energy provides…

COHR LEAPseries DS 0619 3.pdf

COHR LEAPseries DS 0619 3.pdf

…interface for control and fast data acquisition · 248 nm and 308 nm wavelengths for optimized processing of a large variety of materials APPLICATIONS · LLO - Laser Lift-Off · PLD - Pulsed Laser Deposition · LDP - Laser Direct Patterning · Micro-Structuring · LIFT - Laser Induced Forward Transfer

COMPex excimer laser

COMPex excimer laser

…installation and operation. They deliver superior results in demanding applications, such as solid sampling systems (LA-ICPMS), material research (PLD), and precise material processing. The COMPex laser provides multi-hundred millijoules output, plus unmatched pulse-to-pulse stability. It also comes…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…and operation. They deliver
superior results in demanding applications, such as solid sampling
systems (LA-ICPMS), material research (PLD) and precise material
processing.
Featuring new ceramic preionization, the COMPex provides multihundred millijoules output, plus unmatched…

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

…4PLD

SrTiO3
Lcn
PT

LLO
LLO

1

308nm LLO

""

10,000

YBCO""
77K

YBCO

PLD YBCO
PLD

PLD

YBCO
PLD 308nm

1~2µm
4~12mm
0.5~200m/h
FBG

FBG
FBG

1)

4)

2)

PI PI
TFT TFT TFT

LAMBDA SX Excimer Laser Series

LAMBDA SX Excimer Laser Series

…ranging from microstructuring, advanced semiconductor packaging, manufacturing of high-temperature superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA). Contact Us About This Product Close PRICE…

Excimer Lasers

Excimer Lasers

…millijoules output and unmatched pulse-to-pulse stability. It is ideal for demanding applications such as solid sampling (LA-ICPMS), material research (PLD), and precise material processing. ExciStar ExciStar ExciStar excimer lasers are tabletop-size lasers designed for easy system integration. They…

COHR Whitepaper PLD  Excimer 2018 10 German.pdf

COHR Whitepaper PLD Excimer 2018 10 German.pdf

…DLC-Verschleißschichten werden hoher Temperaturen im Beschichtungsprozess
vermieden. In einer Vakuumkammer erfolgt die gepulste Laserabscheidung (PLD) einer ca. 0,1 µm taC-Schicht
auf dem Substrat durch die Ablation eines Graphittargets bei einer Laserwellenlänge von 248 nm . Die dabei…

COHR Whitepaper PLD Excimer 2018 10 English.pdf

COHR Whitepaper PLD Excimer 2018 10 English.pdf

…the sp3 content of PLD grown ta-C films, determined by
means of electron-energy-loss spectroscopy (EELS). The maximum sp3 content of 85 % is obtained at
fluences in the range of 10 J/cm2 to 20 J/cm2.
Fig 2: The sp3-content and optical energy band gap of PLD grown ta-C films as…

Excimer laser technology trends

Excimer laser technology trends

…Delmdahl and R P¨
atzel
Figure 1. Optics performance over a four-year equivalent pulse count under typical PLD conditions.
Figure 2. Static gas lifetime of a standard PLD laser filled with 248 nm premix gas.
The low pulse count translates into a lifetime for the laser
tube…

COHR COMPexSeries DS 0618 8.pdf

COHR COMPexSeries DS 0618 8.pdf

…installation and operation. They deliver superior results in demanding applications, such as solid sampling systems (LA-ICPMS), material research (PLD) and precise material processing. Featuring new ceramic preionization, the COMPex provides multihundred millijoules output, plus unmatched…

COHR LEAPseries DS 0518 9.pdf

COHR LEAPseries DS 0518 9.pdf

…fast and large area processing · Ethernet interface for control and fast data acquisition · 248 nm and 308 nm wavelengths for optimized processing of a large variety of materials APPLICATIONS · LLO - Laser Lift-Off · PLD - Pulsed Laser Deposition · LDP - Laser Direct Patterning · Micro-Structuring