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1 - 12 of 17 Products for 'Polysilicon Annealing' Page 1 of 2 |

Polysilicon Annealing

34706a cover.indd

34706a cover.indd

…In the
past, these polysilicon layers could only be produced on expensive special glass at high temperatures.
However, excimer-based processes, such as excimer laser annealing (``ELA'') have allowed high-volume
production of low-temperature polysilicon (``LTPS'') on conventional…

Coherent

Coherent

…expensive special glass at high temperatures. However, excimer-based
processes, such as excimer laser annealing (``ELA'') have allowed high-volume production of
low-temperature polysilicon (``LTPS'') on conventional glass substrates. Our excimer lasers provide an
invaluable solution…

LineBeam systems

LineBeam systems

--> LineBeam Large Format Polysilicon Annealing The demand for high definition and power efficient low-temperature polysilicon (LTPS) display backplanes is rising to be the foremost differentiator for mobile devices such as smartphones and tablets. LineBeam systems are the enabling technology for…

VYPER Series Lasers

VYPER Series Lasers

…multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit perfectly with…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

Superior Reliability & Performance
34
LineBeam
Large Format Polysilicon Annealing
Demand is rising for high definition and power efficient low temperature
polysilicon (LTPS) display backplanes to be the foremost differentiator
for mobile devices such as smartphones…

COHR LineBeam DS 0718 7.pdf

COHR LineBeam DS 0718 7.pdf

LineBeam Large Format Polysilicon Annealing Demand is rising for high definition and power efficient low temperature polysilicon (LTPS) display backplanes to be the foremost differentiator for mobile devices such as smartphones and tablets. LineBeam systems from Coherent are the enabling technology…

OLED Flexible Displays OPE2017 .pdf

OLED Flexible Displays OPE2017 .pdf

…at several points in the production of OLED devices on traditional (rigid) substrates. Standout examples include excimer lasers used for polysilicon annealing of display backplanes, and for laser lift-off to separate flexible display films from glass substrates. Other important applications are the…

Case Study Excimer ELA 2018 English.pdf

Case Study Excimer ELA 2018 English.pdf

…Laser Annealing for Brilliant AMOLED Displays Excimer laser annealing is key to mass production of polysilicon substrates for high-performance mobile displays. Vyper/LineBeam-technology supplies the global demand. The smartphone and tablet revolution has spurred the broad-scale use of polysilicon

FutureElectronics June2014.pdf

FutureElectronics June2014.pdf

…of the polysilicon layer via excimer laser annealing with a line beam focus
· Figure 2: Atomic force microscopy image of an etched LTPS film on display glass
· Figure 3: Principle sketch
of a Vyper/LineBeam-1300
LTPS production system with
integrated annealing chamber…

32311a coverSinglesRR.indd

32311a coverSinglesRR.indd

…In the past, these polysilicon
layers could only be produced on expensive special glass at high temperatures. However, excimer-based
processes, such as excimer laser annealing (``ELA'') have allowed high-volume production of
low-temperature polysilicon (``LTPS'') on conventional…

an rep 2018 workfile 02

an rep 2018 workfile 02

…In the
past, these polysilicon layers could only be produced on expensive special glass at high temperatures.
However, excimer-based processes, such as excimer laser annealing (``ELA'') have allowed high-volume
production of low-temperature polysilicon (``LTPS'') on conventional…

07(IK14-10)p.53-57.fm

07(IK14-10)p.53-57.fm

…industry-proven, 24/7 workhorse, both at lower levels for
microlithography of ICs, and at kilowatt power levels for
low temperature annealing of polysilicon (LTPS), which is
the de-facto standard for recrystallizing silicon in flat panel
displays. Excimers are available with a…