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Silicon Annealing

Laser Focus World - August 2016

Laser Focus World - August 2016

…pulse energies of our excimer
products. We were already aware of research showing that lasers could be used to
anneal amorphous silicon to create polycrystalline silicon, which is the ideal base
for low-temperature-poly-silicon (LTPS)
TFTs. This, in turn, enables LCD displays…

COHR VYPER DS 0618 6.pdf

COHR VYPER DS 0618 6.pdf

…Very High-Power Excimer Lasers The VYPER Series lasers are multiple beam very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high quality demand in high resolution mobile display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can…

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…production of the most demanding tasks. They enable the "perfect" cutting of substrates, fine patterning, low-temperature polycrystalline silicon (LTPS) annealing, temporary carrier delamination (laser lift-off) for flexible displays, and more. Laser processing offers several opportunities for LED…

COHR TinsleyCustomOptics DS 1018.pdf

COHR TinsleyCustomOptics DS 1018.pdf

…Optical Fabrication Coherent is a world-renowned supplier of custom optical components and assemblies for diverse applications such as silicon annealing, directed energy, and astronomy. We provide components and subsystems for aspheric lenses, and mirror-based systems. The technology for creating…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…High-Power Excimer Lasers
The VYPER Series lasers are multiple beam very high-power excimer
lasers specially designed for Excimer Laser Annealing (ELA). The high
quality demand in high resolution mobile display manufacturing
requires high grade low temperature poly-Silicon (LTPS)…

Excimer laser technology trends

Excimer laser technology trends

…three decades by two
orders of magnitude, as can be seen in figure 6.
The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up
to 1.2 kW of average output power obtained from the latest
308 nm high power excimer laser flagship…

Tinsley Custom Optics

Tinsley Custom Optics

…etc.; and optical materials ranging from metals (aluminum, beryllium, and nickel) and silicon carbide to standard optical glasses, low expansion glasses and infrared crystals (CaF2, ZnSe, ZnS, Silicon, and Germanium) for precise aspheric, flat, and free-form optical components to common spheres…

ILS Annealing.PDF

…This high
temperature would damage standard glass substrates, and
therefore necessitates the use of expensive, heat-resistant
EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME
RAINER PÄTZEL AND RALPH DELMDAHL
Silicon annealing enables
advanced displays

VYPER Series Lasers

VYPER Series Lasers

--> VYPER The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer…

COHR case study LIDAR Zugspitze Mountain 1218.pdf

COHR case study LIDAR Zugspitze Mountain 1218.pdf

…Both scientific and industrial models are available but the industrial
versions have the highest power. These xenon chloride (308 nm) lasers are optimized for precision
materials tasks in the display and electronics industries, including silicon backplane annealing and laser

EU LASER Interview R Waldermann english.pdf

EU LASER Interview R Waldermann english.pdf

…lasers and line
beam optics, comprising LineBeam
Systems which deliver the high energy pulses in a long line beam that performs silicon annealing at market-enabling throughput rates. However, this
has been a "moving target" because
display manufacturers keep increasing the size…

COHR Whitepaper PLD Excimer 2018 10 English.pdf

COHR Whitepaper PLD Excimer 2018 10 English.pdf

…Laser Institute Mittweida in
Germany utilizes a second excimer laser to perform low-temperature annealing of the silicon. They have shown
that the use of repeated deposition and annealing cycles can deliver thick (>2 µm) films having no internal
stress and high hardness, and can be…