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Excimer laser technology trends

Excimer laser technology trends

thyratron switches to the conductive mode.
Improved thyratron designs with additional grids helped to
achieve a higher hold-off voltage, more reliable triggering and
amorehomogeneousdischarge. Subsequently, largercathodes
for higher achievable forward currents, made the thyratron



…they are capable of operating and maintaining the laser system safely.
Key Topics: Function of all main modules like laser tube, HV circuit, Thyratron, gas handling, water cooling,
energy monitoring, and internal and external communication; safety aspect and sources of hazard; operation of…

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