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Uvblade

UVblade Excimer Laser

UVblade Excimer Laser

--> UVblade Laser Lift-Off Processing Laser Lift-Off separation is the enabling technology in manufacturing of flexible displays. UVblade gently detaches delicate polymer-based displays of all types from their rigid glass carriers. UVblade is available at line beam lengths supporting fast and…

Excimer Lasers

Excimer Lasers

…highest yield. UV Optical Components UV Optical Components A wide range of UV Optical Components to make the most of your UV laser beam. UVblade UVblade UVblade systems enable wafer and panel-based Laser Lift-Off separation and MicroLED mass transfer. VarioLas VarioLas VarioLas UV material…

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

…well flexible OLED lift-off from all carrier substrates including transparent and colorless polyimide (CPI). Related Products COMPex LAMBDA SX LEAP UVblade Excimer Laser Annealing Demand is rising for high definition and power efficient low temperature polysilicon (LTPS) display backplanes to be the…

UV Processing Solutions

UV Processing Solutions

…highest yield. UV Optical Components UV Optical Components A wide range of UV Optical Components to make the most of your UV laser beam. UVblade UVblade UVblade systems enable wafer and panel-based Laser Lift-Off separation and MicroLED mass transfer. VarioLas VarioLas VarioLas UV material…

COHR UVblade DS 0818 7.pdf

COHR UVblade DS 0818 7.pdf

UVblade Datasheet
UVblade Performance
2D-profile of the flat-top short and long axis.
SPECIFICATIONS UVblade 250 UVblade 380 UVblade 465 UVblade 750 UVblade 1000
Wavelength (nm) 308 308 308 308 308
Laser Pulse Energy (mJ) 580 580 1000 1000/20001 2000
Repetition Rate…

COHR UVblade DS 0120 3.pdf

COHR UVblade DS 0120 3.pdf

UVblade Datasheet
UVblade Performance
Example of UVblade 750 2D-beam profile, short and long axis cross sections in the substrate plane.
SPECIFICATIONS1 UVblade
250
UVblade
380
UVblade
465
UVblade
750
UVblade
750HP
UVblade
1000…

COHR ExcimerCatalog2020 final lr.pdf

COHR ExcimerCatalog2020 final lr.pdf

…Systems
UVblade
UVblade Performance
Example of UVblade 750 2D-beam profile, short and long axis cross sections in the substrate plane.
SPECIFICATIONS1 UVblade
250
UVblade
380
UVblade
465
UVblade
750
UVblade
750HP
UVblade
1000…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

Superior Reliability & Performance
32
SPECIFICATIONS UVblade 250 UVblade 380 UVblade 465 UVblade 750 UVblade 1000
Wavelength (nm) 308 308 308 308 308
Laser Pulse Energy (mJ) 580 580 1000 1000/20001 2000
Repetition Rate (Hz) 200 200 600 600 600
Energy Density…

ILSChinaFlexible DisplayManufacturing Chinese.pdf

ILSChinaFlexible DisplayManufacturing Chinese.pdf

2017 3 -- 31
www.industrysourcing.cn
Technology Report

10,000

+

1J

25%

80%
-

Coherent
UVblade

40%

4

95%
-

±150µm 5

50%90% 96%

2%

20 µm

""

300 mm

2

3 750 mm

4

5

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…a requirement
for high throughput. UVblade systems cover today's typical wafer sizes, and up to 155 mm line
length is installed in pilot production today with a roadmap to 8" and more.
Figure 5. Beam profile of the 155mm LineBeam of the UVblade @ 248 nm with short axis (SA) and long…

ILS Japan 2017-09 - OPE Electronics.pdf

ILS Japan 2017-09 - OPE Electronics.pdf

250mm

750mm

2

0.4mm

250mm1cm2
750mm3cm2 1
1

1
1

1
UV

1

25%UV

3

80%

UV

-

UV

UVblade

UV

40%

4

Industrial Laser Solutions Japan September 2017
14
t e c h n o l o g y r e p o r t
750mm

COHR MaterialsProcessingBrochure 0816revA 3.pdf

COHR MaterialsProcessingBrochure 0816revA 3.pdf

…excimer laser is our"workhorse" to anneal 100 nm a-Si film on large
glass substrates that enables production of high resolution displays.
UVblade systems are also used for fast and gentle separation of flexible displays resting on polymer films from their rigid glass carriers.
Its…