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Variolas

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

…to be highly selective, and to process large areas at industrial speed and with superior quality and yield. Related Products LAMBDA SX UVblade VarioLas LEAP Related Product Families Excimer Lasers & UV Beam Delivery Laser Machines and Systems Excimer Laser Annealing The challenge for Liquid…

VarioLas UV material processing | Coherent

VarioLas UV material processing | Coherent

…laser models to enable efficient processing Datasheet VarioLas Applications Application Process Material Laser Lift-Off Dopant Activation Heat Treating Semiconductor --> Features & Benefits VarioLas Model VarioLas Eco VarioLas Pro VarioLas Sweep Field Geometry Square Square Line Substrate Field…

UV Processing Solutions

UV Processing Solutions

…and is available at line beam lengths supporting fast and effective separation of substrates for manufacturing of flexible displays. VarioLas VarioLas VarioLas UV material processing systems are affordable tools for high-quality UV microprocessing. They are offered at 193 nm, 248 nm, and 308 nm.…

UV Processing Solutions

UV Processing Solutions

…and is available at line beam lengths supporting fast and effective separation of substrates for manufacturing of flexible displays. VarioLas VarioLas VarioLas UV material processing systems are affordable tools for high-quality UV microprocessing. They are offered at 193 nm, 248 nm, and 308 nm.…

Excimer Lasers & UV Beam Delivery

Excimer Lasers & UV Beam Delivery

…and is available at line beam lengths supporting fast and effective separation of substrates for manufacturing of flexible displays. VarioLas VarioLas VarioLas UV material processing systems are affordable tools for high-quality UV microprocessing. They are offered at 193 nm, 248 nm, and 308 nm.…

COHR VarioLas DS 0418 7.pdf

COHR VarioLas DS 0418 7.pdf

VarioLas Datasheet
SPECIFICATIONS VarioLas Eco VarioLas Pro VarioLas Sweep
Field Geometry Square Square Line
Substrate Field Size (mm2) 2 x 2 2 x 2 50 x 0.6
Optical Resolution (µm) 30 5 -
Working Distance (mm) 50 50 150
Max. Repetition Rate (Hz) 100 100 100
Max.…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

Superior Reliability & Performance
38
SPECIFICATIONS VarioLas Eco VarioLas Pro VarioLas Sweep
Field Geometry Square Square Line
Substrate Field Size (mm2) 2 x 2 2 x 2 50 x 0.6
Optical Resolution (µm) 30 5 -
Working Distance (mm) 50 50 150
Max. Repetition Rate…

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