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Wafer Inspection

Azure-Brochure.pdf

Azure-Brochure.pdf

…the next generation
of inspection along the semiconductor industry
roadmap, the Azure deep-UV laser delivers. It
emits a wavelength of 266 nm, which allows
detection of smaller defects that longer wavelengths miss. This results in higher wafer yield
and better mask…

Microelectronics

Microelectronics

…used in two applications: in lithography tools and in inspection. There are many different inspection steps in a modern semiconductor fab and Coherent lasers are used in most of them: mask inspection, bare and patterned wafer inspection. Coherent has many years of experience building lasers for…

Advances in Diode Lasers and OPSLs

Advances in Diode Lasers and OPSLs


range of 355 nm to 1064 nm. In addition, expansion
into the IR and UV will be accomplished by applying
different wafer materials and wafer types. For OPSLs,
UV wavelengths can also be generated very elegantly
by nonlinear optical processes (e.g., frequencydoubling).…

Azure Laser | Coherent

Azure Laser | Coherent

…Ideal for next-generation semiconductor inspection techniques, disc mastering or the manufacturing of fiber bragg gratings Datasheet Azure Applications Application Process Laser Inspection Wafer and Reticle Inspection Fiber Bragg Grating semiconductor inspection --> Features & Benefits The Azure…

EU CMM Luebeck Luger Interview 0918.pdf

EU CMM Luebeck Luger Interview 0918.pdf

…fabrication is inspection of
un-patterned wafers to identify
contaminants. Our Azure and
Paladin lasers, which employ
different types of specialised UV
DPSS technology, are utilised
for this application as well as
for patterned wafer inspection.
The Azure…

Paladin Advanced 355

Paladin Advanced 355

…Advanced 355 Applications Application Process Material Materials Processing Microelectronics Doping Inspection Laser Direct Imaging (LDI) Thin Film Scribing Semiconductor Solar Cell/Panel wafer Mask PC Board Memory Photopolymer FPD --> Features & Benefits Paladin Advanced 355 is the flagship…

Paladin Compact 355 quasi-CW laser

Paladin Compact 355 quasi-CW laser

…Paladin Compact 355 2000 4000 Air Cooled Drawing Paladin Compact 355 Applications Process Material Doping Inspection Laser Direct Imaging (LDI) Thin Film Scribing Semiconductor Solar Cell/Panel wafer Mask PC Board Memory Photopolymer FPD --> Features & Benefits Paladin Compact 355 comes in power…

INNOVA FreD systems

INNOVA FreD systems

…Scientific Raman Spectroscopy Compact Disk and DVD Mastering Fiber Bragg Grating Inspection Laser Direct Imaging (LDI) Lithography Choose a Process Optical Disk Media Germanium-Doped Optical Fiber Patterned Semiconductor Wafer Precision Optics Reticle Photoresist Fluorescence Excitation --> Features…

32311a coverSinglesRR.indd

32311a coverSinglesRR.indd

…decreased 9% for fiscal 2015, but were
higher in the fourth quarter of fiscal 2015 compared to the prior quarter due to increases in wafer
inspection applications. Service orders remain strong due to high utilization rates in most fabs and
orders for new equipment are tied to specific…

34706a cover.indd

34706a cover.indd

…fiscal 2016 and were 26%
higher in the fourth quarter of fiscal 2016 compared to the third quarter of fiscal 2016 due to increases
in wafer inspection (investments for mobile logic chips) and ink jet nozzle printing applications. Service
orders and shipments remain strong due to high…

Coherent

Coherent

…of semiconductor
devices to smaller defects has been to use defect detection and inspection techniques that are closely
linked to the manufacturing process. For example, automated laser-based inspection systems are now
used to detect and locate defects as small as 0.01 micron, which…

Please Read Before Continuing

Risk factors: Except for the historical information contained here, many of the matters discussed in this Web site are forward-looking statements, based on expectations at the time they were made, that involve risks and uncertainties that could cause our results to differ materially from those expressed or implied by such statements. These risks are detailed in the “Factors That May Affect Future Results” section of our latest 10-K or 10-Q filing. Coherent assumes no obligation to update these forward-looking statements.


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