Search for Lasers, Laser Systems, Laser Measurment, Laser Service Coherent Inc., Worldwide websites Coherent Inc., calendar of events Coherent Inc., office locator Coherent Inc., Service Centers
     > Search
Search Coherent
Coherent Inc.
Superior Reliability & Performance
  • Lasers and Laser-based Systems
  • Laser Measurement and Control
  • Precision Optics
  • Related Accessories
Please enter a search phrase.

1 - 8 of 8 Search Results for a4003
Search Suggestions: novaline | 193 nm laser | lambda | mopa
1.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2 Best match in this PDF  |  All matches in this PDF
... progress in the development of high repetition rate ultra-narrow band lasers for high NA 193 nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultra Linenarrowed (SOUL) design which yields a bandwidth of less than 0.30 pm FWHM. The SOUL laser enables superior optical ...
Related Searches: 193 nm laser | novaline | mopa

2.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 1 OF 7)
... progress in the development of high repetition rate ultra-narrow band lasers for high NA 193 nm microlithography scanners. The laser, NovaLine A4003, is based on a Single Oscillator Ultra Linenarrowed (SOUL ) design which yields a bandwidth of less than 0.30 pm FWHM. The SOUL laser enables superior ...
Related Searches: 193 nm laser

3.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 2 OF 7)
... optics. For this task Lambda Physik has developed a passive damping system, which comprises in the so-called LDU suspension. For the NovaLine A4003 laser the LDU suspension has been greatly improved in comparison to former models. Requirement for the LDU suspension is that it fixes the LDU in its position ...
Related Searches: novaline

4.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 3 OF 7)
... -5 -4 -3 -2 -1 0 1 2 3 4 5 Rel. Wavelength [pm] Norm. Intensity bandwidth: 0.26pm, FWHM spectral purity: 0.60pm, E95% Figure 3 Bandwidth of NovaLine A4003 For the NovaLine A4003 we completed a study on these purge gas parameter, which has lead to a new optimization of the purge gas system. With this ...

5.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 4 OF 7)
... -billion laser pulses the influence of the optical modules and laser windows on the optical laser performance must get minimized. For the NovaLine A4003 we have addressed the laser windows. The windows not only see the highest energy density but also face pressure and temperature gradients, since they ...

6.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 5 OF 7)
... the wavelength of the monitoring scale. The hollow cathode lamp gives reference to the atomic transition of iron at 193.4538 nm. For the NovaLine A4003 laser the wavelength and bandwidth monitor system have been redesigned. The finesse of the monitoring optics has been increased to achieve a higher ...

7.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 6 OF 7)
... 1000 1500 2000 2500 3000 3500 Pulse Counter [mio] Bandwidth [pm] Bandwidth, FWHM Grat. Spectr., FWHM Specification Figure 8 Bandwidth of NovaLine A4003 The energy stability of the laser takes direct influence on achieving the accurate dose on the wafer. For the process it is important to achieve a high ...

8.  pdf document  ExcimerLasersforSuper-HighNA193nmLithographyRev2  (PAGE 7 OF 7)
The dose stability of the NovaLine A4003 laser was measured to be 0.15% at the 1 billion test point and is found to be 0.20% at the 3 billion laser pulses test point which still present a high margin versus the specification limit. 4. CONCLUSION The NovaLine A4003 laser has been developed for 193 nm ...

Search Suggestions: novaline | 193 nm laser | lambda | mopa


Site Search by  Site Search powered by SLI Systems