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1 - 10 of 78 Search Results for beam homogenizer
Search Suggestions: microlas | beam shaper | top hat | lpx-210 | geuking | beam profiler | fused silica | trench | excimer laser annealing | 193 nm laser

1pdf document  UVBEAM Best match in this PDF  |  All matches in this PDF
UV Beam Homogenizing and Profile Monitoring L A S E R S Y S T E M G M B H TECHNICAL INFORMATION UV radiation is being used in industrial processes to an increasing extent. Excimer lasers are the most important radiation sources. However, to take advantage of excimer laser beams, a homogenizing and ...
Related Searches: microlas | beam profiler | 351nm

2pdf document  Excimer_Product_Guide_2008  (PAGE 32 OF 48)
... and Components UV Optical Systems Functional Blocks1. Description UVoptical systems usually include a set of blocks that form the illumination beam path and the imaging beam path. The optical system shapes and homogenizes the laser radiation to illuminate a mask that contains the desired pattern. This ...

3pdf document  BeamShapingLFW05Rev2  (PAGE 2 OF 3)
0506lf06f2.eps BEAM-SHAPING OPTICS thus consists of the average of the profile of the individual slices. Separate lenslet arrays are used for the x and y axes because the axes have different intensity distributions and dimensions. This simple approach provides flexibility in system size, performance ...

4pdf document  BeamShapingLFW05Rev2 Best match in this PDF  |  All matches in this PDF
0506lf06f1.eps BEAM-SHAPING OPTICS Reprinted with revisions to format, from the June 2005 edition of LASER FOCUS WORLD Copyright 2005 by Pennwell Corporation Beam-shaping optics expand excimer-laser applications ANDREW MASTERS AND THORSTEN GEUKING xcimer lasers are used in an increasingly diverse range ...
Related Searches: beam shaper | beam profiler | top hat

5pdf document  IMID_Korea_2004_17-4_SLS1Rev2 Best match in this PDF  |  All matches in this PDF
... pulse to pulse energy stability. Larger substrates can now be processed in better quality with either the SLS process or the new optics for line beam excimer laser annealing. 1. Introduction Middle and small size flat panel displays (FPD) are under a constant challenge to provide higher resolution for ...
Related Searches: excimer laser annealing | microlas | camera

6pdf document  pdf_232  (PAGE 7 OF 16)
... fused silica plates by laser-induced backside wet etching (LIBWE)", Proc. of SPIE, 4830, 156 (2003). ns-pulsed Excimer laser (KrF, XeCl, XeF) Beam homogenizer Mask Lens Dye solution Silica glass

7pdf document  ExcimersPushMachingLimitsforResolutionRev2  (PAGE 1 OF 3)
... F2-laser micromachining operates at a wavelength of 157 nm. CCD Energy meter Precision xyz stage CCD White light Threeposition translator F2-laser beam Homogenizer lens 9 × 9 cyl. lenses 22 × 22-mm field Homogenizer Enclosure: inert gas flow Dielectric attenuator Prism expander VUV fluorescent window ...

8pdf document  ExcimersPushMachingLimitsforResolutionRev2 Best match in this PDF  |  All matches in this PDF
... F2-laser micromachining operates at a wavelength of 157 nm. CCD Energy meter Precision xyz stage CCD White light Threeposition translator F2-laser beam Homogenizer lens 9 × 9 cyl. lenses 22 × 22-mm field Homogenizer Enclosure: inert gas flow Dielectric attenuator Prism expander VUV fluorescent window ...
Related Searches: fused silica | trench | microlas

9pdf document  Tuilaser_2
... mind, the laser-group in Hamburg are working with a KrF excimer laser. The key element of the cleaning device are illustrated below. They include a beam homogenizer to provide a `top hat'laser beam profile for homogeneous irradiation of samples. The beam is focused down to 2x2 mm2 and directed across ...

10pdf document  HighRep-RateExcimerLasersforMicromachingRev2  (PAGE 6 OF 9)
Figure 7: Near field (left) and far field (right) beam profile of the excimer laser with PDP optics. The far field beam is nearly Gaussian shape. The spatial coherence length of the short axis could be reduced by nearly an order of magnitude. Remarkable is the equalization of the divergence with PDP ...


Search Suggestions: microlas | beam shaper | top hat | lpx-210 | geuking | beam profiler | fused silica | trench | excimer laser annealing | 193 nm laser
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