1 - 10 of 253 Search Results for beam homogenizer
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3.
50390-164.indd
(PAGE 3 OF 3)
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…homogenizer pupil
Homogenizer
pupil
Homogenizer
BEAM-SHAPING OPTICS
The beam-delivery and shaping system for this application
must correct both axes to properly fill the photomask. This is
accomplished using separate
cylindrical lens expanders and
homogenizers…
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4.
ExcimerProductGuide2008.qxd
(PAGE 39 OF 52)
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…attenuator module, deflection mirrors, telescope lenses,
homogenizer optics, field lenses and a projection lens (imaging
lens). Each system's design can also include observation
optics with CCD cameras, an optional beam profiling monitor,
as well as additional sensors and actuators…
Related Searches: microlas
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5.
Highlights No. 63 | 12.11.QXP
(PAGE 7 OF 16)
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…backside wet etching (LIBWE)",
Proc. of SPIE, 4830, 156 (2003).
ns-pulsed
Excimer
laser
(KrF, XeCl,
XeF)
Beam homogenizer
Mask Lens
Dye solution
Silica glass
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6.
50390-164.indd
(PAGE 2 OF 3)
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…beam homogenizer for that axis generates
an output width of 2 mm. A field lens and
a slit mask are included. The slit can be
used to clip the edges of the beam profile
in the narrow axis, ensuring very sharp
edges, if required by the application. The
homogeneous beam is…
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8.
300WXeClExcimerLaserAnnealingRev2.pdf
(PAGE 2 OF 8)
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Figure 1: Principle of excimer laser annealing. The pulsed excimer laser beam is homogenized and shaped to a line and scanned
across the surface. Within the laser pulse duration the amorphous silicon layer is rapidly heated and melted. As it cools down the
recrystallization into polycrystalline…
Related Searches: lambda physik krf | excimer laser
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9.
Paper Title
(PAGE 7 OF 8)
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…projection pattern on the sample is obtained in a typical set-up by illuminating the entire field of micro mirrors
with a homogenized and appropriately shaped excimer laser beam. The light reflected by the micro mirror array acting
as spatial light modulator consecutively passes a flat-field lens…
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