UV BeamHomogenizing and Profile Monitoring L A S E R S Y S T E M G M B H TECHNICAL INFORMATION UV radiation is being used in industrial processes to an increasing extent. Excimer lasers are the most important radiation sources. However, to take advantage of excimer laser beams, a homogenizing and ... Related Searches:microlas | beam profiler | 351nm
... and Components UV Optical Systems Functional Blocks1. Description UVoptical systems usually include a set of blocks that form the illumination beam path and the imaging beam path. The optical system shapes and homogenizes the laser radiation to illuminate a mask that contains the desired pattern. This ...
0506lf06f2.eps BEAM-SHAPING OPTICS thus consists of the average of the profile of the individual slices. Separate lenslet arrays are used for the x and y axes because the axes have different intensity distributions and dimensions. This simple approach provides flexibility in system size, performance ...
0506lf06f1.eps BEAM-SHAPING OPTICS Reprinted with revisions to format, from the June 2005 edition of LASER FOCUS WORLD Copyright 2005 by Pennwell Corporation Beam-shaping optics expand excimer-laser applications ANDREW MASTERS AND THORSTEN GEUKING xcimer lasers are used in an increasingly diverse range ... Related Searches:beam shaper | beam profiler | top hat
... pulse to pulse energy stability. Larger substrates can now be processed in better quality with either the SLS process or the new optics for line beam excimer laser annealing. 1. Introduction Middle and small size flat panel displays (FPD) are under a constant challenge to provide higher resolution for ... Related Searches:excimer laser annealing | microlas | camera
... mind, the laser-group in Hamburg are working with a KrF excimer laser. The key element of the cleaning device are illustrated below. They include a beamhomogenizer to provide a `top hat'laser beam profile for homogeneous irradiation of samples. The beam is focused down to 2x2 mm2 and directed across ...
Figure 7: Near field (left) and far field (right) beam profile of the excimer laser with PDP optics. The far field beam is nearly Gaussian shape. The spatial coherence length of the short axis could be reduced by nearly an order of magnitude. Remarkable is the equalization of the divergence with PDP ...