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1.    BeamShapingLFW05Rev2  (PAGE 3 OF 3) 0506lf06f4.eps Field lens Mask Imaging lens Pupil position = image of homogenizer pupil Homogenizer pupil Homogenizer BEAM-SHAPING OPTICS The beam-delivery and shaping system for this application must correct both axes to properly fill the photomask. This is accomplished using separate cylindrical ...

2.    Excimer_ProductGuide2009_7  (PAGE 39 OF 52) ... subsystems are manufactured for integration into workstations. Configurations consist of an attenuator module, deflection mirrors, telescope lenses, homogenizer optics, field lenses and a projection lens (imaging lens). Each system's design can also include observation optics with CCD cameras, an optional ... Related Searches: microlas | beam profiler

3.    pdf_232  (PAGE 7 OF 16) ... fused silica plates by laser-induced backside wet etching (LIBWE)", Proc. of SPIE, 4830, 156 (2003). ns-pulsed Excimer laser (KrF, XeCl, XeF) Beam homogenizer Mask Lens Dye solution Silica glass Related Searches: homogenizer

4.    MicroLas_brochure Best match in this PDF  |  All matches in this PDF UV Beam Delivery Solutions MicroLas Superior Reliability & Performance The power of experience. Coherent has delivered more excimer lasers than all other laser companies combined, and has provided excimer beam delivery solutions longer than anyone. This unparalleled experience means you get cutting ... Related Searches: microlas | audi | geolas

5.    300WXeClExcimerLaserAnnealingRev2  (PAGE 2 OF 8) Figure 1: Principle of excimer laser annealing. The pulsed excimer laser beam is homogenized and shaped to a line and scanned across the surface. Within the laser pulse duration the amorphous silicon layer is rapidly heated and melted. As it cools down the recrystallization into polycrystalline silicon ... Related Searches: homogenizer | lambda steel

6.    Solid-StatePulsedHigh-RepetitionRateExcimerLasersRev2  (PAGE 7 OF 8) A desired projection pattern on the sample is obtained in a typical set-up by illuminating the entire field of micro mirrors with a homogenized and appropriately shaped excimer laser beam. The light reflected by the micro mirror array acting as spatial light modulator consecutively passes a flat-field ... Related Searches: homogenizer

7.    REL_TuiLaserReprint Best match in this PDF  |  All matches in this PDF ... an excited transient complex -- e.g., ArF, KrF, XeCl or F2 -- that emits ultraviolet laser radiation. To obtain a smooth discharge and a homogeneous beam, the gas in the tube must be preionized, which was achieved in early excimers by using a spark discharge. Unfortunately, those early excimers established ... Related Searches: doped fiber | halogen filter

8.    Excimer_ProductGuide2009_7  (PAGE 34 OF 52) ... and Components UV Optical Systems Functional Blocks1. Description UVoptical systems usually include a set of blocks that form the illumination beam path and the imaging beam path. The optical system shapes and homogenizes the laser radiation to illuminate a mask that contains the desired pattern. This ... Related Searches: homogenizer

9.    300WXeClExcimerLaserAnnealingRev2  (PAGE 7 OF 8) 3. TECHNOLOGY OUTLOOK Large TFT displays Large TFT displays, which will be available in the future, require ELA systems with line beam optics of more than 550 mm width. Therefore there is need for XeCl excimer lasers which deliver output energies up to 1.7 Joule. With this target in mind MicroLas and ... Related Searches: lambda steel | homogenizer

10.  Verdi V Series ... enable a wide range of scientific and industrial applications such as: • Scientific Research Laser power, wavelength, linewidth, pulse length, and beam profile are all optimized for your particular scientific application. • Ultrafast Spectroscopy • Atom Trapping & Cooling • Optical Tweezers • CW ... Related Searches: coherent verdi v10 | verdi | verdi 10 | verdi v10

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