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1 - 10 of 791 Search Results for beam optics
Search Suggestions: homogenizer | beam homogenizer | microlas | lpx | lpx 100 | beam profiler | gas laser | lambda steel | ltps | temperature controller

1pdf document  UVBEAM Best match in this PDF  |  All matches in this PDF
UV Beam Homogenizing and Profile Monitoring L A S E R S Y S T E M G M B H TECHNICAL INFORMATION UV radiation is being used in industrial processes to an increasing extent. Excimer lasers are the most important radiation sources. However, to take advantage of excimer laser beams, a homogenizing and ...
Related Searches: homogenizer | beam homogenizer | microlas | lpx

2pdf document  300WXeClExcimerLaserAnnealingRev2 Best match in this PDF  |  All matches in this PDF
... due to the low temperature of the annealing process. The Lambda Physik high power excimer laser series are operated with the MicroLas 370 mm line beam optics, integrated by Japan Steel Works into industrial systems. The MicroLas line beam optics for conventional excimer laser annealing (ELA) process ...
Related Searches: gas laser | homogenizer | lambda steel | ltps

3pdf document  UVBEAM  (PAGE 2 OF 6)
... industrial processes to an increasing extent. Excimer lasers are the most important radiation sources. However, to take advantage of excimer laser beams, a homogenizing and shaping procedure before applying it to material processing is necessary. Even more important, the optimization of beam homogenizing ...
Related Searches: beam shaper | beam homogenizer

4pdf document  UVBEAM  (PAGE 4 OF 6)
... window has to be removed or replaced by fused silica. For 193nm, the indirect method with fluorescence plate is being used. Clearly, direct UV beam micropattern monitoring requires an effort much higher than the methods using fluorescent plates described above (a, b). Whether (d) is necessary or can ...

5pdf document  UVBEAM  (PAGE 5 OF 6)
Summary Beam profile monitoring is of great advantage in high precision excimer laser-based processing. For example, the homogenous illumination of a hole array mask provides highaccuracy hole size control of the ink jet nozzles to be drilled with excimer laser radiation. The crystallization process ...

6pdf document  IMID_Korea_2004_17-4_SLS1Rev2 Best match in this PDF  |  All matches in this PDF
... @lambdaphysik.com Phone: +49 551 69380 Fax: +49 551 68691 Abstract We report on progress in developing high-power excimer lasers as well as UV-optics for creating low-temperature poly silicon (LTPS). A new high-power excimer laser offers 315 Watts with high pulse to pulse energy stability. Larger substrates ...
Related Searches: excimer laser annealing | beam homogenizer | microlas | homogenizer

7Silicon Annealing with Eximer Lasers
... absorbed in an ultra thin amorphous silicon surface layer without heating the underlying substrate. A line-shaped and homogenized excimer laser beam is scanned across the surface. See Figure 2. Within the laser pulse duration (approx. 25 ns) the amorphous-silicon layer is rapidly heated and melted. ...
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8pdf document  IMID_Korea_2004_17-4_SLS1Rev2  (PAGE 3 OF 3)
Asia Display/IMID 04 Proceedings 2nd shot. Beam edge of 2nd shot should overlap with 1st shot [1]. Figure 6: The JSW FLXTM system incorporating the LAMBDA STEEL 2000 and the CrystaLas optics (source: The Japan Steel Works). Recent progress of SLS system development made it possible to use 30 mm FOV ...

9pdf document  EOSChem1Satellite  (PAGE 3 OF 12)
... Technology, p. 563 (1998) The output spatial mode specification is that: only power in the specified TEM00 mode is counted, and the LLO output beam waist must be 4.1 mm located 465 mm from the LLOradiator interface. The output polarization specification is equal parts horizontal and vertical (within ...

10pdf document  THzLaserforEOWChemSatellite  (PAGE 3 OF 12)
... Technology, p. 563 (1998) The output spatial mode specification is that: only power in the specified TEM00 mode is counted, and the LLO output beam waist must be 4.1 mm located 465 mm from the LLOradiator interface. The output polarization specification is equal parts horizontal and vertical (within ...


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