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beam homogenizer

Microelectronics

Microelectronics

…when using lens-based objectives. These beam delivery optics can achieve a homogenized spot with a diameter as small as five (5) microns, which is ideal for sampling small fluid inclusions. The optics also include interchangeable circular and square beam shaping masks providing high sampling…

Excimer Cleaning for sensitive surfaces.qxd

Excimer Cleaning for sensitive surfaces.qxd

…of the cleaning device is a beam forming and scanning unit (Fig. 1). To improve the laser beam quality for homogeneous irradiation of samples, a beam homogenizer was developed which forms a rectangular cross section with tophat beam profile (see Fig. 2). The beam is focused down to 2x2 mm2 and…

LineBeam systems | Coherent

LineBeam systems | Coherent

…Wavelength (nm) 308 308 308 308 Energy Density (mJ/cm 2) 390 395 395 435 Line Beam Length (mm) 750 1000 1300 1500 Line Beam Width (µm) 440 660 510 550 Long Axis Homogeneity (%, 2 sigma) 1.4 1.8 1.8 1.8 Short Axis Homogeneity (%, 2 sigma) 3.0 3.0 3.0 3.0 Depth of Focus (µm) ±150 ±120 ±120 ±120 …

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…ShortAxisOnlineMonitor CBE-SigmaMonitor P-LensEntranceMonitor SBE-SigmaMonitor LineBeam Systems for Excimer Laser Annealing Key Features · Excellent beam profile homogeneity · Outstanding optical lifetime performance · Display industry proven technology, large installation base world wide · Standard…

Microsoft Word - Document1

Microsoft Word - Document1

Diffractive beam homogenizers typically generate a line by transforming the laser spot into a repeating series of small, closely spaced dots. Depending on the specific technology used, this type of line suffers from various deficiencies. With high coherence lasers for example, this approach can…

Efficient-Transformation-of-Gaussian-Beams-into-Uniform-Rectangular-Intensity-Distributions FORMFIRST.pdf

Efficient-Transformation-of-Gaussian-Beams-into-Uniform-Rectangular-Intensity-Distributions FORMFIRST.pdf

…redistributed from the beam center to the edges in the far field (which is usually begins at 100 mm from the last lens surface). This can be seen clearly in the ray trace diagram (see Figure 4.) Because a Powell lens is a type of cylindrical lens, it only homogenizes the beam in one dimension. So,…

Microsoft Word - e-newsletter Whitepaper FPD-rev2.docx

Microsoft Word - e-newsletter Whitepaper FPD-rev2.docx

…11 Each oscillator beam enters the beam forming module 1 at a pulse energy of 1 Joule and is spatially formed by a telescope to fit the area of a subsequent homogenizing stage. After beam homogenization the beams are extended and overlayed within module 2. Since overlaying the beams and adding their…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…ShortAxisOnlineMonitor CBE-SigmaMonitor P-LensEntranceMonitor SBE-SigmaMonitor LineBeam Systems for Excimer Laser Annealing Key Features · Excellent beam profile homogeneity · Outstanding optical lifetime performance · Display industry proven technology, large installation base world wide · Standard…

GeoLasHD excimer ablation laser system | Coherent

GeoLasHD excimer ablation laser system | Coherent

…193 Energy Density on Sample (J/cm 2) 1 - 50 Spot Diameter on Sample (µm) 2 - 160 Optical Resolution (µm) 1 Pulse Energy Stability (%, rms) 1 Beam Homogeneity (%, rms) 1 Max. Repetition Rate (Hz) 10 (opt. 100) X,Y-Drive Min. Step Size (µm) 0.1 Z-Focus Min. Step Size (µm) 0.1 GeoLasHD Key Features…

VYPER Series Lasers | Coherent

VYPER Series Lasers | Coherent

…Motorized optics mounts (optional) Remote beam adjustment via hand-held control panel Solid-State Switch Maintenance-free operation Purged, External Resonator Design Highest beam stability and optics lifetime Corona Preionization Stable, homogeneous output Metal Ceramic Tube Extended tube lifetime…

COHR GeoLasHD.pdf

COHR GeoLasHD.pdf

…GeoLasHD GeoLasHD Performance System Specifications GeoLasHD Operating Wavelength (nm) 193 Spot Sizes (µm) 4 to 160 Optical Resolution (µm) 1 Beam Homogeneity (%)(1 sigma) 1 Maximum Fluence (J/cm2) 50 Pulse Stability (%, rms) 2 Repetition Rate (Hz) 1 to 100 X,Y-Drive Min. Step Size (µm) 0.1 Z-Focus…

COHR GeoLasHD.pdf

COHR GeoLasHD.pdf

…GeoLasHD GeoLasHD Performance System Specifications GeoLasHD Operating Wavelength (nm) 193 Spot Sizes (µm) 4 to 160 Optical Resolution (µm) 1 Beam Homogeneity (%)(1 sigma) 1 Maximum Fluence (J/cm2) 50 Pulse Stability (%, rms) 2 Repetition Rate (Hz) 1 to 100 X,Y-Drive Min. Step Size (µm) 0.1 Z-Focus…

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