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beam homogenizer

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…Lift-Off Applications Key Features · Cost effective laser optical solutions for Laser Lift-Off (LLO) · Single shot processing · Highest beam utilization · Homogeneous energy distribution · Includes Coherent excimer laser Specifications1 1 EDpmeasuredatFWHMofsmallaxis. 2 Moredetailsonspecsonrequest.…

Laser Focus World - November 2017

Laser Focus World - November 2017

…of the excimer laser is homogenized and reshaped into a long, thin line typically having a length that is equal to the width (or half the width), of the panel. This allows the entire panel to be processed in one (or two, respectively) passes under the laser beam, which is critical to achieving…

Efficient-Transformation-of-Gaussian-Beams-into-Uniform-Rectangular-Intensity-Distributions FORMFIRST.pdf

Efficient-Transformation-of-Gaussian-Beams-into-Uniform-Rectangular-Intensity-Distributions FORMFIRST.pdf

…reviews other beam homogenization technologies, and then examines Coherent's flat-top technology based on the Powell lens in detail. Achieving Uniform Illumination The most simple and direct way to transform a Gaussian beam into a uniform intensity distribution is to pass the beam through an…

Microsoft Word - Document1

Microsoft Word - Document1

Diffractive beam homogenizers typically generate a line by transforming the laser spot into a repeating series of small, closely spaced dots. Depending on the specific technology used, this type of line suffers from various deficiencies. With high coherence lasers for example, this approach can…

Efficient-Transformation-of-Gaussian-Beams-into-Uniform-Rectangular-Intensity-Distributions FORMFIRST.pdf

Efficient-Transformation-of-Gaussian-Beams-into-Uniform-Rectangular-Intensity-Distributions FORMFIRST.pdf

…reviews other beam homogenization technologies, and then examines Coherent's flat-top technology based on the Powell lens in detail. Achieving Uniform Illumination The most simple and direct way to transform a Gaussian beam into a uniform intensity distribution is to pass the beam through an…

Microsoft Word - Document1

Microsoft Word - Document1

Diffractive beam homogenizers typically generate a line by transforming the laser spot into a repeating series of small, closely spaced dots. Depending on the specific technology used, this type of line suffers from various deficiencies. With high coherence lasers for example, this approach can…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…experiments. The line beam width is 0.25-0.4 mm, depending on the line length. Such a high aspect ratio of the line beam field is generated by independently shaping the two axes of the homogenized excimer laser beam. The long-axis dimension is defined solely in the homogenizer, which therefore…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…experiments. The line beam width is 0.25-0.4 mm, depending on the line length. Such a high aspect ratio of the line beam field is generated by independently shaping the two axes of the homogenized excimer laser beam. The long-axis dimension is defined solely in the homogenizer, which therefore…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…experiments. The line beam width is 0.25-0.4 mm, depending on the line length. Such a high aspect ratio of the line beam field is generated by independently shaping the two axes of the homogenized excimer laser beam. The long-axis dimension is defined solely in the homogenizer, which therefore…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…interferometry at 193 nm. Another parameter which must be optimized is the beam profile. An asymmetric beam profile results in poorly defined coherence in the object plane of the interference microscope. A homogeneous beam profile is a key to data that can be interpreted meaningfully. Furthermore,…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…interferometry at 193 nm. Another parameter which must be optimized is the beam profile. An asymmetric beam profile results in poorly defined coherence in the object plane of the interference microscope. A homogeneous beam profile is a key to data that can be interpreted meaningfully. Furthermore,…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…interferometry at 193 nm. Another parameter which must be optimized is the beam profile. An asymmetric beam profile results in poorly defined coherence in the object plane of the interference microscope. A homogeneous beam profile is a key to data that can be interpreted meaningfully. Furthermore,…

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