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beam homogenizer

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…· Short and long axis beam homogeneity
for maximum throughput and beam
utilization
· Proven performance in leading
large-scale OLED and LCD fabs
· Active control and observation
modules for reproducible annealing
results
· Line beam lengths scalable up

COHR GeoLasHD DS 0318 4.pdf

COHR GeoLasHD DS 0318 4.pdf

…Datasheet
SPECIFICATIONS GeoLasHD
Operating Wavelength (nm) 193
Spot Sizes (µm) 2 to 160
Optical Resolution (µm) 1
Beam Homogeneity (%) (1 sigma) 1
Maximum Fluence (J/cm2) 50
Pulse Stability (%, rms) 1
Repetition Rate (Hz) 1 to 10 (option: 1 to 100)

Excimer laser technology trends

Excimer laser technology trends

…and excessive electrode wear.
Therefore, the introduction of solid-state switching to high
power lasers improved long-term beam homogeneity and
pulse-to-pulse stability, in particular.
The introduction of highly effective dc resonant charging
power supplies followed…

COHR LineBeam DS 0718 7.pdf

COHR LineBeam DS 0718 7.pdf

…large process window · Short and long axis beam homogeneity for maximum throughput and beam utilization · Proven performance in leading large-scale OLED and LCD fabs · Active control and observation modules for reproducible annealing results · Line beam lengths scalable up to Gen 10.5 panel size…

Laser Focus World - November 2017

Laser Focus World - November 2017

…excimer laser is homogenized and reshaped into a long,
thin line typically
having a length that
is equal to the width
(or half the width),
of the panel. This allows the entire panel
to be processed in one (or two, respectively) passes under the laser beam, which is

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…7. Typical beam profile for Raster Scan.
Figure 7 shows a measured beam profile for the 248 nm beam line of the UVblade. The line
length (LA) is 52 mm and the width in the short axis (SA) is about 0.5 mm. The use of high grade
UV optical materials and beam homogenization in both axes…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…The line beam width is
0.25-0.4 mm, depending on the line length. Such a high
aspect ratio of the line beam field is generated by independently shaping the two axes of the homogenized excimer
laser beam. The long-axis dimension is defined solely in
the homogenizer, which…

COHR HighLightDL HPR DS 0818.pdf

COHR HighLightDL HPR DS 0818.pdf

…for integration into a wide variety of laser-based manufacturing systems. FEATURES & BENEFITS · Output power: 1,000 to 4,000 Watts · 19" Rack for integration · Fiber coupled · Homogenous beam profile · Comprehensive accessories available APPLICATIONS · Heat Treatment · Cladding · Brazing

Case Study Excimer ELA 2018 English.pdf

Case Study Excimer ELA 2018 English.pdf

…laser beam of the Vyper
enters the optical delivery module
,,LineBeam" and all beams are
successively mixed, expanded
and spatially superimposed. In
the final stage, a combined line
beam is projected onto the
substrate as a homogeneous line
beam with…

COHR UVblade DS 0818 7.pdf

COHR UVblade DS 0818 7.pdf

…(Hz) 200 200 600 600 600
Energy Density (mJ/cm2) (at 96%) 370 340 330 340/3201 315
Beam Length (mm) 250 380 465 750 950
Beam Width (µm) (at 96%) 400 300 400 250/5001 400
Homogeneity Long Axis (%, 2) 1.8 1.8 1.8 1.8 1.8
Steepness Short Axis (µm) 100 70 125 70/1251 85

FutureElectronics June2014.pdf

FutureElectronics June2014.pdf

…up to 600 Hz and stabilized output power up to 2,400 W. Fed into
the LineBeam optical delivery system
the result is a homogeneous excimer
laser line beam with on-substrate dimensions up to 1,300 mm x 0.4 mm
capable of fast, large-format generation 6 and generation 8 LTPS panel…

ILS Annealing.PDF

…to be processed in one
or two passes under the laser beam. This is critical to achieving the process utilization and rapid throughput necessary for
economically viable LTPS.
The excimer laser beam profile is also homogenized to
construct a highly uniform (so-called "top hat")…

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