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beam scan

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…Table 1. UV blade line beam scanning systems for LLO processing consist of the UV excimer laser source, which nowadays extends to output power levels beyond kilowatts [6], and a line beam optical system design, as shown in Figure 4. The optical train transforms the laser beam into an extremely…

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ModeMaster PC User Manual

ModeMaster PC User Manual

…ModeMaster PC Scan Head body until the azimuth angle on the Live/Alignment screen = 45° (referred to as the "standard azimuth angle"). This will align the scan head so that the knife-edges read the X-axis as horizontal and the Y-axis as vertical. The pinholes will scan across the beam at an azimuth…

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ModeMaster PC User Manual

ModeMaster PC User Manual

…ModeMaster PC Scan Head body until the azimuth angle on the Live/Alignment screen = 45° (referred to as the "standard azimuth angle"). This will align the scan head so that the knife-edges read the X-axis as horizontal and the Y-axis as vertical. The pinholes will scan across the beam at an azimuth…

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ModeMaster PC User Manual

ModeMaster PC User Manual

…ModeMaster PC Scan Head body until the azimuth angle on the Live/Alignment screen = 45° (referred to as the "standard azimuth angle"). This will align the scan head so that the knife-edges read the X-axis as horizontal and the Y-axis as vertical. The pinholes will scan across the beam at an azimuth…

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ModeMaster PC User Manual

ModeMaster PC User Manual

…the scan head so the input beam is parallel with the instrument optical axis) and the dot and circle both to the center of the alignment target (adjust scan head so the input beam is on its optical axis). The adjustments controlling the translation and angular adjustment of the ModeMaster PC scan…

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ModeMaster PC User Manual

ModeMaster PC User Manual

…the scan head so the input beam is parallel with the instrument optical axis) and the dot and circle both to the center of the alignment target (adjust scan head so the input beam is on its optical axis). The adjustments controlling the translation and angular adjustment of the ModeMaster PC scan…

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ModeMaster PC User Manual

ModeMaster PC User Manual

…the scan head so the input beam is parallel with the instrument optical axis) and the dot and circle both to the center of the alignment target (adjust scan head so the input beam is on its optical axis). The adjustments controlling the translation and angular adjustment of the ModeMaster PC scan…

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CMM 10.4.indd

CMM 10.4.indd

…scan lens which focuses it to a spot size in the 10 to 20 microns range on the surface of the OLED. Because the field of view of the scan lens is relatively limited - typically a few hundred millimeters - a motorised xy stage can provide additional part motion in conjunction with this beam scanning.…

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ModeMaster PC User Manual

ModeMaster PC User Manual

…Scan Head. B. Resolution of the current alignment screen (resolutions of 1x 2x, 4x, 8x, and 16x are available). C. Fixed alignment target. The user may adjust the scan head so that the beam indicators are centered on this target to make the beam and instrument optical axis coincide. D. Relative beam…

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ModeMaster PC User Manual

ModeMaster PC User Manual

…Scan Head. B. Resolution of the current alignment screen (resolutions of 1x 2x, 4x, 8x, and 16x are available). C. Fixed alignment target. The user may adjust the scan head so that the beam indicators are centered on this target to make the beam and instrument optical axis coincide. D. Relative beam…

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ModeMaster PC User Manual

ModeMaster PC User Manual

…Scan Head. B. Resolution of the current alignment screen (resolutions of 1x 2x, 4x, 8x, and 16x are available). C. Fixed alignment target. The user may adjust the scan head so that the beam indicators are centered on this target to make the beam and instrument optical axis coincide. D. Relative beam…

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ModeMaster PC User Manual

ModeMaster PC User Manual

…the right of INT on the screen contain beam parameters computed from measured beam width data for the beam inside the scan head in the ModeMaster PC Scan Head. K. h1. Location of the input principal plane H1; this is the distance from the front bezel of the scan head to H1. Negative values indicate…

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