1 - 10 of 26 Search Results for compex
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2.
Excimer lasers for thin films
(PAGE 3 OF 6)
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…-pulse energy stability. A typical energy stability measurement for a free running COMPex laser operated
at a wavelength of 248 nm at 10 Hz is shown in Figure 3.
Figure 3: Energy energy stability of a COMPex with smooth ceramic preionization measured over 1000 laser pulses at a wavelength
…
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5.
Coherent, Inc. 10-K
(PAGE 11 OF 93)
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Market Segment Application Products Technology
Pollution Analysis COMpex Excimer
Metrology (Measuring
Technology)
OPTex, COMPex
NovaTech
Excimer
Excimer
Spectroscopy COMPex
Gator family, Chameleon
Mira, RegA, OPO
899, MBR, MBD
Innova family…
Related Searches: excimer | labmaster
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6.
Excimer lasers for thin films
(PAGE 5 OF 6)
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…design.
4. OVERVIEW OF LASER PARAMETERS
Table 1 gives a concise overview of the main specifications of the COMPex and LPX excimer lasers for a wavelength
of 193 nm.
COMPex LPX
Wavelength 193 nm 193 nm
Max. pulse energy 400 mJ 650 mJ
Average power 4 W 45 W
Max. repetition…
Related Searches: halogen
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7.
Excimer lasers for thin films
(PAGE 1 OF 6)
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…dissipation of heat transfer to the surrounding zone. The effect is an inherently precise and clean ablation quality.
The excimer laser series LPX and COMPex described in this paper were redesigned to provide cost-efficient, stable,
high pulse energy excimer lasers which fully meet the needs of advanced…
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8.
Excimer lasers for thin films
(PAGE 2 OF 6)
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…lasers.
2.2 Optimized Gas Flow and Gas Purification System
In order to extend the hands-off operation time of both the LPX series and the COMPex series, the gas flow architecture
and the internal electrostatic gas purification systems have been redesigned. Laser gas contaminants are efficiently…
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9.
Excimer lasers for thin films
(PAGE 6 OF 6)
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…laser series LPX and COMPex have been described in this paper. Based on
proven technologies applied for industrial and lithography excimer laser sources, stable and cost-efficient high-pulse
energy lasers fitted to thin film production demands have been realized. The COMPex and LPX laser series…
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10.
Highlights No. 59-4.1.02.QXP
(PAGE 8 OF 12)
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…
narrowed pulses at 353.2 nm and applied
this system successfully in investigations on
hot hydrocarbon flames [9]. They used a
COMPex 150T in an oscillator-amplifier
mode (single pass amplification). Spectrally
narrowed laser light ( = 4 pm) was
generated in the oscillator…
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