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compexpro

UV Processing Solutions

UV Processing Solutions

…0.4J/cm 2 VYPER, TwinVYPER VarioLas 193, 248, 308 Line or Rectangular 50 mm x 0.6 mm or 2 mm x 2 mm 0.2-5 J/cm 2 COMPexPro, LPXpro GeoLasPro 193 Round Spot 4-160 µm 1-45 J/cm 2 COMPexPro Call 1-800-227-8840 Outside the U.S. 1-408-764-4983 Coherent has locations across the globe that are available to…

Microelectronics

Microelectronics

…in higher deposition efficiency. Finally, higher pulse energy provides a larger process window, allowing a more consistent process. Coherent’s COMPexPro and LPXpro laser series are designed for demanding high-pulse energy applications and are highly effective tools for pulsed laser deposition. They…

COHR COMPexProSeries 0916.pdf

COHR COMPexProSeries 0916.pdf

Small Footprint High Pulse Energy Excimer Lasers COMPexPro Series Energy stability of COMPexPro 201 at 248 nm under typical PLD operating conditions Mechanical Specifications COMPexPro 100 Service Side View Top View Connection Side View Beam Exit Side View

COHR COMPexProSeries 0916.pdf

COHR COMPexProSeries 0916.pdf

Small Footprint High Pulse Energy Excimer Lasers COMPexPro Series Energy stability of COMPexPro 201 at 248 nm under typical PLD operating conditions Mechanical Specifications COMPexPro 100 Service Side View Top View Connection Side View Beam Exit Side View

COHR COMPexProSeries DS 1016 2.pdf

COHR COMPexProSeries DS 1016 2.pdf

…Reliability & Performance COMPexPro Series COMPexPro Features: · High pulse energy · Preset stabilized energy operation · Integrated, purgeable energy monitor · Increased static gas lifetime COMPexPro Options: · Unstable Resonator · Tube Temperature Stabilization COMPexPro Applications: · PLD -…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…248 12 500 351 5 500 IndyStar1 193 8 1000 193 4 2000 248 12 1000 248 6 2000 COMPexPro COMPexPro 50 193 100 50 248 150 50 COMPexPro 100 193 200 100 248 400 100 308 250 100 351 150 100 COMPexPro 200 193 400 50 248 700 50 308 500 50 351 300 50 BraggStar M 248 140 100 1 Max.energy(mJ)isstabilizedenergy.…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…248 12 500 351 5 500 IndyStar1 193 8 1000 193 4 2000 248 12 1000 248 6 2000 COMPexPro COMPexPro 50 193 100 50 248 150 50 COMPexPro 100 193 200 100 248 400 100 308 250 100 351 150 100 COMPexPro 200 193 400 50 248 700 50 308 500 50 351 300 50 BraggStar M 248 140 100 1 Max.energy(mJ)isstabilizedenergy.…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…248 12 500 351 5 500 IndyStar1 193 8 1000 193 4 2000 248 12 1000 248 6 2000 COMPexPro COMPexPro 50 193 100 50 248 150 50 COMPexPro 100 193 200 100 248 400 100 308 250 100 351 150 100 COMPexPro 200 193 400 50 248 700 50 308 500 50 351 300 50 BraggStar M 248 140 100 1 Max.energy(mJ)isstabilizedenergy.…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

…248 12 500 351 5 500 IndyStar1 193 8 1000 193 4 2000 248 12 1000 248 6 2000 COMPexPro COMPexPro 50 193 100 50 248 150 50 COMPexPro 100 193 200 100 248 400 100 308 250 100 351 150 100 COMPexPro 200 193 400 50 248 700 50 308 500 50 351 300 50 BraggStar M 248 140 100 1 Max.energy(mJ)isstabilizedenergy.…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 17 COMPexPro Excimer Lasers Wavelength1 COMPexPro COMPexPro COMPexPro COMPexPro COMPexPro (nm) 50 102 110 201 205 MaximumPulseEnergy1 (mJ) 193 100 200 200 400 400 248 150 400 400 700 700 308 - 250 250 500 500 351 - 150 150 300…

COHR COMPexProSeries 0916.pdf

COHR COMPexProSeries 0916.pdf

COMPexPro 200 Small Footprint High Pulse Energy Excimer Lasers COMPexPro Series VISIBLE AND INVISIBLE LASER RADIATION. AVOID EYE OR SKIN EXPOSURE TO DIRECT OR SCATTERED RADIATION. CLASS IV LASER RADIATION PRODUCT PER EN60825-1 (1994) Model COMPexPro 102 COMPexPro 110 COMPexPro 201 COMPexPro 205…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

· Toll Free: (800) 527-3786 · Tel: (408) 764-4983 · Fax: (800) 362-1170 17 COMPexPro Excimer Lasers Wavelength1 COMPexPro COMPexPro COMPexPro COMPexPro COMPexPro (nm) 50 102 110 201 205 MaximumPulseEnergy1 (mJ) 193 100 200 200 400 400 248 150 400 400 700 700 308 - 250 250 500 500 351 - 150 150 300…

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