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…Repetition Rate (Hz) 10 (opt. 100) X,Y-Drive Min. Step Size (µm) 0.1 Z-Focus Min. Step Size (µm) 0.1 GeoLasHD Key Features High Energy 193 nm COMPexPro Inside Highest Fluence Range on the Market Superior Pulse-to-Pulse Stability Hands-Off Operation Over Weeks Petrographic Microscope Observation…

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