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deep uv

MBD200 DSrevB

MBD200 DSrevB

System Specifications1 Typical Beam Parameters Utility and Environmental Requirements MBD-266 Single Frequency Deep UV Source Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent's scientific and industrial lasers are certified to…

COHR LPXproSeries DS 1016 1.pdf

COHR LPXproSeries DS 1016 1.pdf

…Lasers LPXpro Series LPXpro 220 F at 248 nm True specs: power specification with margin LPXpro 220 F at 193 nm and 5 Hz High pulse energy in deep UV System Specifications LPXpro 210 LPXpro 220 LPXpro 240 LPXpro 305 LPFpro 205 LPFpro 220 Wavelength1 (nm) Max. Pulse Energy 157 - - - - 50 40 (mJ)…

MBD200 DSrevB

MBD200 DSrevB

System Specifications1 Typical Beam Parameters Utility and Environmental Requirements MBD-266 Single Frequency Deep UV Source Coherent follows a policy of continuous product improvement. Specifications are subject to change without notice. Coherent's scientific and industrial lasers are certified to…

COHR Azure DS 0717 4.pdf

COHR Azure DS 0717 4.pdf

…Azure enables high-throughput UV light processes. FEATURES · 266 nm CW, ultra low noise · Hands-free operation · Full remote control · Automated laser stability controls · Long lifetime >6250 hours APPLICATIONS · Semiconductor Inspection · Grating Writing · UV Spectroscopy · Lithography Azure

Refractive Surgery with Excimers EU OuP.pdf

Refractive Surgery with Excimers EU OuP.pdf

…surgeon and the patient. Laser refractive surgeries have long used deep ultraviolet (193 nm) pulses from an argon fluoride excimer laser to perform computer-controlled spatially selective ablation of corneal tissue. The deep UV wavelength is strongly absorbed with a penetration depth of a few…

IndyStar DS

IndyStar DS

2071 mm (81.5 in.) 255 mm (10.0 in.) 173.5 mm (6.8 in.) 320 mm (12.6 in.) 1228 mm (48.3 in.) 3905 mm (153.7 in.) 2100 mm (82.7 in.) 305 mm (12.0 in.) 85 mm (3.3 in.) 20 mm (0.8 in.) 220 mm (8.7 in.) 500 mm (19.7 in.) 700 mm (27.6 in.) 580 mm (22.8 in.) 480 mm (18.9 in.) 65 mm (2.6 in.) LineBeam…

IndyStar DS

IndyStar DS

2071 mm (81.5 in.) 255 mm (10.0 in.) 173.5 mm (6.8 in.) 320 mm (12.6 in.) 1228 mm (48.3 in.) 3905 mm (153.7 in.) 2100 mm (82.7 in.) 305 mm (12.0 in.) 85 mm (3.3 in.) 20 mm (0.8 in.) 220 mm (8.7 in.) 500 mm (19.7 in.) 700 mm (27.6 in.) 580 mm (22.8 in.) 480 mm (18.9 in.) 65 mm (2.6 in.) LineBeam…

IndyStar DS

IndyStar DS

2071 mm (81.5 in.) 255 mm (10.0 in.) 173.5 mm (6.8 in.) 320 mm (12.6 in.) 1228 mm (48.3 in.) 3905 mm (153.7 in.) 2100 mm (82.7 in.) 305 mm (12.0 in.) 85 mm (3.3 in.) 20 mm (0.8 in.) 220 mm (8.7 in.) 500 mm (19.7 in.) 700 mm (27.6 in.) 580 mm (22.8 in.) 480 mm (18.9 in.) 65 mm (2.6 in.) LineBeam…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…compared to a more traditional Mask Qualification system. Thus the difficulties associated with stability requirements and material properties in the deep UV, such as absorption and scattering losses, are overcome. Coherent has carefully optimized its IndyStar ArF excimer laser to meet the demanding…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…compared to a more traditional Mask Qualification system. Thus the difficulties associated with stability requirements and material properties in the deep UV, such as absorption and scattering losses, are overcome. Coherent has carefully optimized its IndyStar ArF excimer laser to meet the demanding…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…compared to a more traditional Mask Qualification system. Thus the difficulties associated with stability requirements and material properties in the deep UV, such as absorption and scattering losses, are overcome. Coherent has carefully optimized its IndyStar ArF excimer laser to meet the demanding…

Meterless-Laser-Energy-Measurement-Concept-Lowers-Cost-and-Simplifies-Integration FORMFIRST.pdf

Meterless-Laser-Energy-Measurement-Concept-Lowers-Cost-and-Simplifies-Integration FORMFIRST.pdf

…flexibility. Specifically, a consumer may purchase one or more sensor heads, each optimized for a different type of power measurement (e.g. deep UV excimer lasers, high energy Nd:YAG lasers, etc.). These are then mated with meter instrumentation that is obtained separately. Here, again, the…

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