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deep uv

00 SabreMFreD Preinstall.book

00 SabreMFreD Preinstall.book

…"boil-off" nitrogen source may be used as an alternative. Dry air may not be used as it contains oxygen which can be converted to ozone by the deep UV produced by the plasma discharge. Receiving the System The Innova Sabre MotoFreD ion laser is shipped in three crates: one contains the power supply,…

LPXpro series DSrevC

LPXpro series DSrevC

…for reliable long-term operation · F-version multi-wavelength for 193, 248, 351 nm changeable operation · C-version for 308 nm operation · LPF deep UV version for 157 and 193 nm operation · Internal burst generator · Hand-held terminal or RS-232 interface Superior Reliability & Performance…

COHR LPXproSeries DS 1016 1.pdf

COHR LPXproSeries DS 1016 1.pdf

…Lasers LPXpro Series LPXpro 220 F at 248 nm True specs: power specification with margin LPXpro 220 F at 193 nm and 5 Hz High pulse energy in deep UV System Specifications LPXpro 210 LPXpro 220 LPXpro 240 LPXpro 305 LPFpro 205 LPFpro 220 Wavelength1 (nm) Max. Pulse Energy 157 - - - - 50 40 (mJ)…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…issue is the reliable measurement of phase shifts created by the PSM in the deep UV. This is due to the lack of suitable and simple interferometric devices in the deep UV. In this application report a deep UV interferometer based on phase gratings is presented. Principles of PSM measurement…

Azure266 DS

Azure266 DS

Azure 266 CW Deep-UV Laser Superior Reliability & Performance Mechanical Specifications Features · 266 nm CW, ultra low noise · Hands-free, easy to integrate · Long lifetime, >6250 hrs. 436 mm (17.17 in.) 505 mm (19.88 in.) 113 mm (4.45 in.) 269 mm (10.59 in.) 120.65 mm (4.75 in.) Output…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…issue is the reliable measurement of phase shifts created by the PSM in the deep UV. This is due to the lack of suitable and simple interferometric devices in the deep UV. In this application report a deep UV interferometer based on phase gratings is presented. Principles of PSM measurement…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…issue is the reliable measurement of phase shifts created by the PSM in the deep UV. This is due to the lack of suitable and simple interferometric devices in the deep UV. In this application report a deep UV interferometer based on phase gratings is presented. Principles of PSM measurement…

MBD200 DSrevB

MBD200 DSrevB

…in.) 179.8 mm (7.08 in.)125.8 mm (4.95 in.) 215.8 mm (8.5 in.) 100.1 mm (3.94 in.) 162.8 mm (6.41 in.) 300 mm (11.81 in.) MBD-266 Single Frequency Deep UV Source Features · Unique mechanical resonator · Enhanced output power · Precision crystal adjustment · High efficiency frequency doubling · MBD…

MBD200 DSrevB

MBD200 DSrevB

…in.) 179.8 mm (7.08 in.)125.8 mm (4.95 in.) 215.8 mm (8.5 in.) 100.1 mm (3.94 in.) 162.8 mm (6.41 in.) 300 mm (11.81 in.) MBD-266 Single Frequency Deep UV Source Features · Unique mechanical resonator · Enhanced output power · Precision crystal adjustment · High efficiency frequency doubling · MBD…

Azure-Brochure.pdf

Azure-Brochure.pdf

The reliable way to move into the UV. Coherent Laser Division Solid-State Continuous-Wave AZUREThe Azure 266 nm CW Deep-UV Laser

MBD200 DSrevB

MBD200 DSrevB

…in.) 179.8 mm (7.08 in.)125.8 mm (4.95 in.) 215.8 mm (8.5 in.) 100.1 mm (3.94 in.) 162.8 mm (6.41 in.) 300 mm (11.81 in.) MBD-266 Single Frequency Deep UV Source Features · Unique mechanical resonator · Enhanced output power · Precision crystal adjustment · High efficiency frequency doubling · MBD…

COHR MBD266 DS 0317 2 FINAL.pdf

COHR MBD266 DS 0317 2 FINAL.pdf

Deep UV Source MBD 266 system is all-solid-state, continuous wave, single frequency, deep-UV source at 266 nm. Stable, low-noise operation results from frequency doubling of the 532 nm output from Verdi pump laser. MBD 266 uses resonant cavity frequency doubling technique for high-efficiency UV

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