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diffraction grating

2011-Diode-Laser-Modules-and-Pattern-Generators-Catalog.pdf

2011-Diode-Laser-Modules-and-Pattern-Generators-Catalog.pdf

…beam splitting option. The angle between each beam is operating wavelength dependent and can be found via the grating formula: d sin =n l (d=period in um, angle in degrees, n = diffraction order, 0, +/-1, +/- 2, ....) 2 Beams3 (m) 3.33, 7.77, 26.3, 338.6 3 Beams (m) 3.33, 7.77, 26.3, 338.6 5 Beams…

2011-Diode-Laser-Modules-and-Pattern-Generators-Catalog.pdf

2011-Diode-Laser-Modules-and-Pattern-Generators-Catalog.pdf

…beam splitting option. The angle between each beam is operating wavelength dependent and can be found via the grating formula: d sin =n l (d=period in um, angle in degrees, n = diffraction order, 0, +/-1, +/- 2, ....) 2 Beams3 (m) 3.33, 7.77, 26.3, 338.6 3 Beams (m) 3.33, 7.77, 26.3, 338.6 5 Beams…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…done by the use of a stripe geometry of the light source, realised by a set of amplitude gratings varying in the grating period to work at different shears. We have demonstrated a stable and accurate diffractive shearing interference microscope for use at l = 193 nm using a Coherent IndyStar ArF…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…done by the use of a stripe geometry of the light source, realised by a set of amplitude gratings varying in the grating period to work at different shears. We have demonstrated a stable and accurate diffractive shearing interference microscope for use at l = 193 nm using a Coherent IndyStar ArF…

Phase Shift Mask Measurements with Excimer Lasers205.qxd

Phase Shift Mask Measurements with Excimer Lasers205.qxd

…done by the use of a stripe geometry of the light source, realised by a set of amplitude gratings varying in the grating period to work at different shears. We have demonstrated a stable and accurate diffractive shearing interference microscope for use at l = 193 nm using a Coherent IndyStar ArF…

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