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1 - 10 of 81 Search Results for ela

1Coherent Inc. LineBeam for crystallization annealing applications.
…Related Applications . -- Select a Related Application -- Annealing of Silicon Backplanes with 540W Excimer Lasers LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates has been transferred into industrial production…
Related Searches: linebeam

2pdf document  UV Lasers LTJJan2011 Best match in this PDF  |  All matches in this PDF
…eliminating the need for expensive quartz or thermal glass substrates. at present, the most widely used LTPs technique is called excimer laser annealing (eLa). UV Laser Beam Focusing Optics Collection Optics Array Detector Scattered Light Wafer Under Test Modulator Scan Optics Direction of Motion Panel Excimer…
Related Searches: uv diode laser | laser lift-off | sapphire wafer | paladin 266

3pdf document  ExcimerLaserSolutions Best match in this PDF  |  All matches in this PDF
…located in Santa Clara, California. The excimer group operates from facilities in both Goettingen and Munich, Germany. · FPD Silicon Annealing -- ELA and SLS · Inkjet Nozzle Drilling · Refractive Eye Surgery -- LASIK and PRK · Marking Eye Glasses · Making "Greener" Automobiles · Medical Disposables…
Related Searches: excimer | fpd | ltps | excimer laser annealing

4UV Lasers Enable Smart Phones and Other Microelectronics  (PAGE 2 OF 3)
…need for expensive quartz or thermal glass
substrates. at present, the most widely used
LTPs technique is called excimer laser annealing (eLa).
UV Laser
Beam
Focusing
Optics
Collection
Optics
Array
Detector
Scattered
Light
Wafer Under Test…
Related Searches: azure 266

5pdf document  pdf 119 Best match in this PDF  |  All matches in this PDF
…compatible with heatsensitive substrates and subsequent processes. In addition, the throughput is high enough to be practical. Excimer laser annealing (ELA) systems (Japan Steel Works; Yokohama, Japan) based on MicroLas exposure technology with Lambda Physik (Ft. Lauderdale, FL) lasers are applied in production…
Related Searches: pulse duration extender | lpx 300 | dye laser | compex 150

6pdf document  IMID Korea 2004 17-4 SLS1Rev2 Best match in this PDF  |  All matches in this PDF
…organic light emitting diode (OLED) displays. The established process for manufacturing of LTPS is excimer laser annealing (ELA) with line beam (LB) technology [4]. A new ELA technology which is now available for production is sequential lateral solidification (SLS) [5]. Both technologies require high…
Related Searches: jsw | oled | presentation | sls

7pdf document  productronic Coherent approved Best match in this PDF  |  All matches in this PDF
…for expensive quartz or thermal glass substrates. At present, the most widely used LTPS annealing technique is called excimer laser annealing (ELA). In ELA, the rectangular beam from a 308 nm excimer laser is optically homogenized and reshaped to form a long narrow line (typically 465 mm x 0.4 mm) that…
Related Searches: ito patterning | avia 355 | laser dicing | 355-20

8Coherent Inc. Display Backplane Crystallization
Display Backplane Crystallization The Excimer Laser Annealing (ELA) process is proving to be much more flexible and economical than previous techniques. Find the Laser Solution that Fits your Application Needs. Search Applications Notes Search by material and/or process. -- SELECT MATERIAL -- Ceramic…
Related Searches: oled | lcd | display

9pdf document  300WXeClExcimerLaserAnnealingRev2 Best match in this PDF  |  All matches in this PDF
…line beam optics, integrated by Japan Steel Works into industrial systems. The MicroLas line beam optics for conventional excimer laser annealing (ELA) process converts the raw laser beam profile into a stable and homogeneous rectangular illumination field with high aspect ratio. The excimer laser light…
Related Searches: lambda steel 1000 | halogen | excimer laser annealing | xecl

10Coherent Inc. Annealing of Silicon Backplanes with 540W Excimer Lasers
…Marking and Engraving Sub-Surface Modification Surface Modification Welding and Soldering View All Application Notes Summary: Excimer Laser Annealing (ELA) is a key process for making Low Temperature Poly-Silicon (LTPS) used in flat panel displays. Here the rectangular beam from a 308 nm excimer laser is…
Related Searches: excimer laser annealing | linebeam


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