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ela

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…by Pulsed Laser Deposition (PLD),
Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for
Excimer Laser Annealing (ELA).
FEATURES & BENEFITS
· Perfect energy stability to ensure
production yield
· Pulse on Demand to enable cost
effective…

COHR LAMBDASX DS 0618 6.pdf

COHR LAMBDASX DS 0618 6.pdf

…Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA). FEATURES & BENEFITS · Perfect energy stability to ensure production yield · Pulse on Demand to enable cost effective Laser Lift-Off · Laser data…

COHR VYPER DS 0618 6.pdf

COHR VYPER DS 0618 6.pdf

…High-Power Excimer Lasers The VYPER Series lasers are multiple beam very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high quality demand in high resolution mobile display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can be…

COHR LineBeam DS 0718 7.pdf

COHR LineBeam DS 0718 7.pdf

…beam utilization · Proven performance in leading large-scale OLED and LCD fabs · Active control and observation modules for reproducible annealing results · Line beam lengths scalable up to Gen 10.5 panel size APPLICATIONS · Excimer Laser Annealing (ELA) of polysilicon backplanes for OLED and LCD

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…LED from the sapphire growth wafer Laser Induced Forward Transfer (LIFT) to move the LED from a donor to the substrate Excimer Laser Annealing (ELA) to fabricate a LTPS-TFT backplane Laser cutting at different levels of aggregation Laser repair of LEDs to address yield issues and defect rates…

34706a cover.indd

34706a cover.indd

…could only be produced on expensive special glass at high temperatures.
However, excimer-based processes, such as excimer laser annealing (``ELA'') have allowed high-volume
production of low-temperature polysilicon (``LTPS'') on conventional glass substrates as well as flexible

32311a coverSinglesRR.indd

32311a coverSinglesRR.indd

…could only be produced on expensive special glass at high temperatures. However, excimer-based
processes, such as excimer laser annealing (``ELA'') have allowed high-volume production of
low-temperature polysilicon (``LTPS'') on conventional glass substrates. Our excimer lasers provide…

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