www.coherent.com | email@example.com | 800-527-3786 | 408-764-4983 Case Study: Excimer Laser Annealing for Brilliant AMOLED Displays Excimer laser annealing is key to mass production of polysilicon substrates for high-performance mobile displays. Vyper/LineBeam-technology supplies the global…
…demand for LTPS LCD displays. Both
OLED and high definition LCD displays are manufactured with the use of our excimer laser annealing
(ELA) tools. Price competition at the panel manufacturer level is fierce. Given these dynamics,
customers are inquiring more about Linebeam systems…
…applications. In terms of sales volume, the single
biggest is Excimer Laser Annealing (ELA) for the
flat panel display market."
virtually all advanced smartphones.
The products we supply for ELA are
our VYPER excimer lasers and line
beam optics, comprising LineBeam
…der größte Anteil durch
die ELA (Excimer Laser Annealing) Anwendung
für den Display-Markt geprägt."
krotechnik, Displays, Biotechnologie
und Energietechnik. Wenn man das
Verkaufsvolumen betrachtet, ist der
größte Anteil durch die ELA (Excimer
…on large glass
panels, such as Gen
6 (1.5 × 1.8 m), that
separated into numerous smaller displays. In the ELA
system, the rectangular output of the
excimer laser is homogenized and reshaped into a long,
thin line typically
having a length…
52 Photonics Spectra September 2016 www.photonics.com
form poly-Si is commonly referred to as
excimer laser annealing (ELA).
In ELA, the excimer output beam is reshaped into a long narrow line profile. The
length of the line ideally matches either the
half or full width of…
…by Pulsed Laser Deposition (PLD),
Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for
Excimer Laser Annealing (ELA).
FEATURES & BENEFITS
· Perfect energy stability to ensure
· Pulse on Demand to enable cost
…Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA). FEATURES & BENEFITS · Perfect energy stability to ensure production yield · Pulse on Demand to enable cost effective Laser Lift-Off · Laser data…
…High-Power Excimer Lasers The VYPER Series lasers are multiple beam very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high quality demand in high resolution mobile display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can be…
…beam utilization · Proven performance in leading large-scale OLED and LCD fabs · Active control and observation modules for reproducible annealing results · Line beam lengths scalable up to Gen 10.5 panel size APPLICATIONS · Excimer Laser Annealing (ELA) of polysilicon backplanes for OLED and LCD
…LED from the sapphire growth wafer Laser Induced Forward Transfer (LIFT) to move the LED from a donor to the substrate Excimer Laser Annealing (ELA) to fabricate a LTPS-TFT backplane Laser cutting at different levels of aggregation Laser repair of LEDs to address yield issues and defect rates…
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