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Case Study Excimer ELA 2018 English.pdf

Case Study Excimer ELA 2018 English.pdf

www.coherent.com | tech.sales@coherent.com | 800-527-3786 | 408-764-4983 Case Study: Excimer Laser Annealing for Brilliant AMOLED Displays Excimer laser annealing is key to mass production of polysilicon substrates for high-performance mobile displays. Vyper/LineBeam-technology supplies the global…

Coherent

Coherent

…demand for LTPS LCD displays. Both
OLED and high definition LCD displays are manufactured with the use of our excimer laser annealing
(ELA) tools. Price competition at the panel manufacturer level is fierce. Given these dynamics,
customers are inquiring more about Linebeam systems…

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

Laser Focus World China 2018-04 Excimer Lasers %28Chinese%29.pdf

AMOLED

TFT

CVD
a-Si

poly-Si

TFT

ELA

308nm

Gen 61.5m×1.8m

ELA

20

Lambda Physik
ELA

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EU LASER Interview R Waldermann english.pdf

EU LASER Interview R Waldermann english.pdf

…applications. In terms of sales volume, the single
biggest is Excimer Laser Annealing (ELA) for the
flat panel display market."
virtually all advanced smartphones.
The products we supply for ELA are
our VYPER excimer lasers and line
beam optics, comprising LineBeam

EU LASER Interview R Waldermann Goettingen German.pdf

EU LASER Interview R Waldermann Goettingen German.pdf

…der größte Anteil durch
die ELA (Excimer Laser Annealing) Anwendung
für den Display-Markt geprägt."
krotechnik, Displays, Biotechnologie
und Energietechnik. Wenn man das
Verkaufsvolumen betrachtet, ist der
größte Anteil durch die ELA (Excimer
Laser Annealing)…

Laser Focus World - November 2017

Laser Focus World - November 2017

…on large glass
panels, such as Gen
6 (1.5 × 1.8 m), that
are subsequently
separated into numerous smaller displays. In the ELA
system, the rectangular output of the
excimer laser is homogenized and reshaped into a long,
thin line typically
having a length…

Photonics Spectra - September 2016

Photonics Spectra - September 2016

52 Photonics Spectra September 2016 www.photonics.com
form poly-Si is commonly referred to as
excimer laser annealing (ELA).
In ELA, the excimer output beam is reshaped into a long narrow line profile. The
length of the line ideally matches either the
half or full width of…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…by Pulsed Laser Deposition (PLD),
Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for
Excimer Laser Annealing (ELA).
FEATURES & BENEFITS
· Perfect energy stability to ensure
production yield
· Pulse on Demand to enable cost
effective…

COHR LAMBDASX DS 0618 6.pdf

COHR LAMBDASX DS 0618 6.pdf

…Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA). FEATURES & BENEFITS · Perfect energy stability to ensure production yield · Pulse on Demand to enable cost effective Laser Lift-Off · Laser data…

COHR VYPER DS 0618 6.pdf

COHR VYPER DS 0618 6.pdf

…High-Power Excimer Lasers The VYPER Series lasers are multiple beam very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high quality demand in high resolution mobile display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can be…

COHR LineBeam DS 0718 7.pdf

COHR LineBeam DS 0718 7.pdf

…beam utilization · Proven performance in leading large-scale OLED and LCD fabs · Active control and observation modules for reproducible annealing results · Line beam lengths scalable up to Gen 10.5 panel size APPLICATIONS · Excimer Laser Annealing (ELA) of polysilicon backplanes for OLED and LCD

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

Microsoft Word - Coherent Whitepaper - Laser Processing of µLED

…LED from the sapphire growth wafer Laser Induced Forward Transfer (LIFT) to move the LED from a donor to the substrate Excimer Laser Annealing (ELA) to fabricate a LTPS-TFT backplane Laser cutting at different levels of aggregation Laser repair of LEDs to address yield issues and defect rates…

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