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ela

Lasers-Enable-Smartphone-Manufacturing.pdf

Lasers-Enable-Smartphone-Manufacturing.pdf

…the need for expensive quartz or thermal glass substrates. At present, the most widely used LTPS technique is called excimer laser annealing (ELA). In ELA, the rectangular beam from a 308 nm excimer laser is optically homogenized and re-shaped to form a long narrow line that has a high degree of…

Lasers-Enable-Smartphone-Manufacturing.pdf

Lasers-Enable-Smartphone-Manufacturing.pdf

…In response, Coherent developed the Vyper series of excimer lasers to deliver a suitable pulse energy/ repetition rate for ELA. And Coherent's latest flagship product for ELA (Figure 7) mates the 1.2 kW 308 nm Vyper excimer laser together with 750 mm length LineBeam optics to deliver a scalable…

Lasers-Enable-Smartphone-Manufacturing.pdf

Lasers-Enable-Smartphone-Manufacturing.pdf

…the need for expensive quartz or thermal glass substrates. At present, the most widely used LTPS technique is called excimer laser annealing (ELA). In ELA, the rectangular beam from a 308 nm excimer laser is optically homogenized and re-shaped to form a long narrow line that has a high degree of…

Microsoft Word - e-newsletter Whitepaper FPD-rev2.docx

Microsoft Word - e-newsletter Whitepaper FPD-rev2.docx

…mainstream and is standardly based on excimer laser annealing (ELA). Current 308 nm excimer laser annealing systems have been upscaled to support glass substrates up to Gen 8 panel size. Excimer Laser Annealing Excimer Laser Annealing (ELA) is a key process step for converting the amorphous silicon…

LineBeam

LineBeam

LineBeam System for excimer laser crystallization annealing applications. LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates was transferred into industrial production in the mid-1990s. This technique is…

Lasers-Enable-Smartphone-Manufacturing.pdf

Lasers-Enable-Smartphone-Manufacturing.pdf

…the need for expensive quartz or thermal glass substrates. At present, the most widely used LTPS technique is called excimer laser annealing (ELA). In ELA, the rectangular beam from a 308 nm excimer laser is optically homogenized and re-shaped to form a long narrow line that has a high degree of…

LAMBDA SX

LAMBDA SX

…is available from 300 Watts (248 nm and 308 nm) to 600 Watts (308 nm only). The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing (ELA), industrial scale Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO), micro structuring, and all other applications which require high UV laser…

Microsoft Word - e-newsletter Whitepaper FPD-rev2.docx

Microsoft Word - e-newsletter Whitepaper FPD-rev2.docx

…mainstream and is standardly based on excimer laser annealing (ELA). Current 308 nm excimer laser annealing systems have been upscaled to support glass substrates up to Gen 8 panel size. Excimer Laser Annealing Excimer Laser Annealing (ELA) is a key process step for converting the amorphous silicon…

Coherent%2C Inc. Prepared Remarks 1Q17 FINAL.pdf

Coherent%2C Inc. Prepared Remarks 1Q17 FINAL.pdf

…quarter was 1.59. Microelectronics Microelectronics orders of $373.6 million increased 155.4% sequentially and 97.8% compared to the prior year period. ELA system and service orders were very strong in the first quarter. The systems were predominantly Linebeam 1000s and will be delivered to multiple…

Coherent%2C Inc. Prepared Remarks 1Q17 FINAL.pdf

Coherent%2C Inc. Prepared Remarks 1Q17 FINAL.pdf

…quarter was 1.59. Microelectronics Microelectronics orders of $373.6 million increased 155.4% sequentially and 97.8% compared to the prior year period. ELA system and service orders were very strong in the first quarter. The systems were predominantly Linebeam 1000s and will be delivered to multiple…

Laser Focus World - November 2017

Laser Focus World - November 2017

…substrate. Production occurs on large glass panels, such as Gen 6 (1.5 × 1.8 m), that are subsequently separated into numerous smaller displays. In the ELA system, the rectangular output of the excimer laser is homogenized and reshaped into a long, thin line typically having a length that is equal…

Lasers-Enable-Smartphone-Manufacturing.pdf

Lasers-Enable-Smartphone-Manufacturing.pdf

…the need for expensive quartz or thermal glass substrates. At present, the most widely used LTPS technique is called excimer laser annealing (ELA). In ELA, the rectangular beam from a 308 nm excimer laser is optically homogenized and re-shaped to form a long narrow line that has a high degree of…

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