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energy max

VarioLas Family

VarioLas Family

Max. Repetition Rate (Hz) 100 100 100 Max. Energy Density (mJ/cm 2) at 193 nm 1000 1000 230 Max. Energy Density (mJ/cm 2) at 248 nm 3500 3500 600 Max. Energy Density (mJ/cm 2) at 308 nm 3000 3000 500 Energy Stability (%, 1 sigma) at 193 nm 2 2 2 Energy Stability (%, 1 sigma) at 248 nm 1 1 1 Energy

COMPex

COMPex

…stability. It also comes with an improved gas processor that extends both gas and optics lifetimes. Model Name Wavelength (nm) Max. Pulse Frequency (Hz) Max. Pulse Energy (mJ) Max. Power (W) COMPex 50 193 50 100 4 COMPex 102 20 240 4.8 COMPex 110 100 240 12 COMPex 201 10 400 4 COMPex 205 50 400 15…

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