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37 - 48 of 133 Products for 'energy stability' Page 4 of 12 |

energy stability

Microelectronics

Microelectronics

…pulse energy provides a larger process window, allowing a more consistent process. Coherent’s COMPexPro and LPXpro laser series are designed for demanding high-pulse energy applications and are highly effective tools for pulsed laser deposition. They deliver the beam stability and energy stability

COHR LEAPseries DS 0518 9.pdf

COHR LEAPseries DS 0518 9.pdf

…308 248 308 308
Stabilized Energy Range (mJ) 550 to 650 550 to 650 900 to 10001 900 to 1000 900 to 1000
Max. Stabilized Average Power (W) 81.25 130 81.25 130 100 150 100 150 300
Max. Repetition Rate (Hz) 125 200 125 200 100 150 100 150 300
Energy Stability (1 Sigma) 1.2 1.2 1.2…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

…(nm) 193 248 193 248 193 248
Max. Repetition Rate (Hz) 200 200 500 500 1000 1000
Stabilized Pulse Energy (mJ) 5 10 5 10 5 10
Stabilized Pulse Power (W) 1 2 2.5 5 5 10
Energy Stability (sigma, %) <2
Beam Dimension (FWHM, mm, V x H) (6 ±0.5) x (2.5 ±0.5)
Pulse Duration…

COHR ExciStar DS 0318 6.pdf

COHR ExciStar DS 0318 6.pdf

…(nm) 193 248 193 248 193 248
Max. Repetition Rate (Hz) 200 200 500 500 1000 1000
Stabilized Pulse Energy (mJ) 5 10 5 10 5 10
Stabilized Pulse Power (W) 1 2 2.5 5 5 10
Energy Stability (sigma, %) <2
Beam Dimension (FWHM, mm, V x H) (6 ±0.5) x (2.5 ±0.5)
Pulse Duration…

COHR VarioLas DS 0418 7.pdf

COHR VarioLas DS 0418 7.pdf

…50 150
Max. Repetition Rate (Hz) 100 100 100
Max. Energy Density (mJ/cm2)
at 193 nm
at 248 nm
at 308 nm
1000
3500
3000
1000
3500
3000
230
600
500
Energy Stability (%, 1 sigma)
at 193 nm
at 248 nm
at 308 nm

COHR LAMBDASX DS 0618 6.pdf

COHR LAMBDASX DS 0618 6.pdf

…LAMBDA SX E500 LAMBDA SX C600
Wavelength (nm) 308 308
Maximum Stabilized Pulse Energy (mJ) 1000 1000
Maximum Stabilized Average Power (W) 500 600
Maximum Repetition Rate (Hz) 500 600
Energy Stability (sigma, %) 0 .45 1
Pulse Duration (FWHM) (ns) 24 ±4 24 ±4
Beam…

2016-Ultrafast-Laser-Systems-Catalog.pdf

2016-Ultrafast-Laser-Systems-Catalog.pdf

…Tel: (408) 764-4983 · Superior Reliability & Performance 79
CEP Stabilizer for Legend Elite
Carrier to Envelope Phase (CEP) Stabilization Accessory for Legend Elite
Key Advantages
· RMS CEP stability typically sub-200 mrad (10 shots integration)
· f-to-2f collinear…

COHR RLScatalog 2017revA web.pdf

COHR RLScatalog 2017revA web.pdf

…Tel: (408) 764-4983 · Superior Reliability & Performance 79
CEP Stabilizer for Legend Elite
Carrier to Envelope Phase (CEP) Stabilization Accessory for Legend Elite
Key Advantages
· RMS CEP stability typically sub-200 mrad (10 shots integration)
· f-to-2f collinear…

COHR VYPER DS 0618 6.pdf

COHR VYPER DS 0618 6.pdf

…(TwinVYPER) and LineBeam 1500 (TriVYPER) optics. FEATURES & BENEFITS · Highest UV power to enable high throughput applications · Excellent energy stability to ensure high production yield · EquiSwitch synchronization to provide lowest jitter · Laser data acquisition to allow advanced process…

COHR IndyStar DS 0818 7.pdf

COHR IndyStar DS 0818 7.pdf


1 kHz
IndyStar 248
2 kHz
Wavelength (nm) 193 193 248 248
Recommended Stabilized Pulse Energy (mJ) 8 4 12 6
Recommended Stabilized Pulse Power (W) 8 8 12 12
Energy Stability (sigma, %) <2 <2 <2 <2
Max. Repetition Rate (Hz) 1000 2000 1000 2000

COHR MonacoSmartCleave DS 0318 4.pdf

COHR MonacoSmartCleave DS 0318 4.pdf

…Vertical ±3°
Beam Pointing Stability (µrad/°C) <25
Pulse Energy Stability (%) (RMS) <1.5
Power Stability (%) (RMS, 2s) <1.5
Warm-up Time (minutes)
Cold Start
Warm Start
<45
<15
Long-term Pointing Stability (rad) ±25 over 8 hours
Head…

COHR Monaco517 DS 0318 4.pdf

COHR Monaco517 DS 0318 4.pdf

…Vertical ±3°
Beam Pointing Stability (µrad/°C) <25
Pulse Energy Stability (%) (RMS) <1.5
Power Stability (%) (RMS, 2s) <1.5
Warm-up Time (minutes)
Cold Start
Warm Start
<45
<15
Long-term Pointing Stability (rad) ±25 over 8 hours
Head…

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