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energy stability



…100 100 100 Max. Energy Density (mJ/cm 2) at 193 nm 1000 1000 230 Max. Energy Density (mJ/cm 2) at 248 nm 3500 3500 600 Max. Energy Density (mJ/cm 2) at 308 nm 3000 3000 500 Energy Stability (%, 1 sigma) at 193 nm 2 2 2 Energy Stability (%, 1 sigma) at 248 nm 1 1 1 Energy Stability (%, 1 sigma) at…



…& Benefits COMPex Features & Benefits UV-energy stability better than 0.75% (1 Sigma) Ultimate Pulse Control (UPC) allows precise processing at the single pulse level Instant Energy Switching (IES) for online adaption of the energy during processing Data recording and extracting of all…

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