1 - 10 of 56 Search Results for excimer lamp
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No Job Name
(PAGE 11 OF 12)
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… radiative lifetime of the excimer states. Excited atoms form excimer molecules rather rapidly by three body collisions with neighboring atoms. Initially formed rare gas ions contribute to the excimer formation via the formation of ionic excimers and subsequent recombination…
Related Searches: vuv lamp
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4.
ExcimerLasersforSuper-HighNA193nmLithographyRev2
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Excimer Lasers for Super-High NA 193 nm Lithography Rainer Paetzel, Hans Stephan Albrecht, Peter Lokai, Wolfgang Zschocke, Thomas Schmidt, Igor Bragin, Thomas Schroeder, Christian Reusch, Stefan Spratte Lambda Physik AG, Hans-Boeckler-Straße 12, D-37079 Goettingen, Germany Tel: +49 551 69380 Fax: +…
Related Searches: 193 nm laser | ldu | mopa
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No Job Name
(PAGE 4 OF 12)
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…Practical use of the highly efficient excimer emission, however, has been delayed until appropriate excitation methods for effective excimermolecule formation were found. One known rare gas excimer VUV light source is the barrier discharge lamp.27 Excitation to high levels is achieved…
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No Job Name
(PAGE 6 OF 12)
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…4171-4180. Figure 3. (A) Excimer emission spectra of argon (Ar2*, top) and krypton (Kr2*, bottom). The ionization potentials of benzene and toluene are indicated. (B) Electron-pumped excimer-lamp SPI TOFMS mass spectra of benzene and toluene recorded with excimer light from argon (Ar2*, …
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SD_EL2-03_tui-bavpho
(PAGE 2 OF 4)
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…the first excimer lamps will be applied in Measuring Technology. a: The "fathers" of the Tui excimer lamp: Dr. Andreas Ulrich and Dr. Jochen Wieser. | b: The heart of the brand new e-lux. | c: The electron-beam pumped lamp can operate at any excimer wavelength as well…
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10.
No Job Name
(PAGE 1 OF 12)
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…deuterium lamps. Although the laser-based techniques are very sophisticated and expensive, the conventional lamps have serious drawbacks regarding their optical parameters, such as low-output power, low spectral power density, and broad emission bands. In this work, a novel excimer VUV…
Related Searches: vuv lamp
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