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1 - 10 of 166 Search Results for excimer laser annealing

1Coherent Inc. Excimer Lasers Drive Laser Crystallization for LTPS
…for excimer lasers and UV optical systems that are the enabling components of the annealing system. Highest laser power of more than 1 kW and optimized line beams of up to 750 mm are used worldwide for the manufacturing of LTPS based LCD and OLED displays. LAMBDA SX-Series The LAMBDA SX lasers are perfectly…
Related Searches: vyper | crystals | amoled

2pdf document  300WXeClExcimerLaserAnnealingRev2 Best match in this PDF  |  All matches in this PDF
excimer lasers allows to produce films with electron mobility of 100-150 cm²/Vsec with the Line beam technique. The new SLS-method, which is currently under industrial investigation, even allows to obtain electron mobility between 200-400 cm²/Vsec. Keywords: High power excimer laser, TFT annealing,…
Related Searches: annealing | ludolf herbst | microlas

3pdf document  pdf 148 Best match in this PDF  |  All matches in this PDF
…Germany Impressum Excimer Laser Technology: Laser Sources, Optics, Systems and Applications is a comprehensive handbook highlighting current excimer laser applications. Leading authorities on the subject of excimer lasers and related topics investigate the current range of excimer laser technology, applications…
Related Searches: spectral correction | photo detector | lambda physik krf

4Coherent Inc. Annealing of Silicon Backplanes with 540W Excimer Lasers
Annealing of Silicon Backplanes with 540W Excimer Lasers Find the Laser Solution that Fits your Application Needs. Search Applications Notes Search by material and/or process. -- SELECT MATERIAL -- Ceramic Composite Diamond Fabric and Leather Glass Metal Paper Plastic Semiconductor Wood and Derivatives…
Related Searches: amoled | silicon annealing | polysilicon annealing | annealing

5ExcimerProductGuide2008.qxd  (PAGE 6 OF 52)
…,microfluidic) · ·
Laser Lift-Off (LLO) · · ·
Surface Treatment
Excimer Laser Annealing (ELA/SLS) ·
Cylinder Honing ·
Pulsed Laser Deposition (PLD) · · ·
Laser Direct Synthesis (LDS) · ·
Laser Direct Patterning (LDP) · ·
Laser-Induced Transfer Imaging…
Related Searches: laser lift off | honing | liti

6Coherent Inc. Excimer Lasers from 157 nm to 350 nm UV range.
lasers are easily integrated into new and existing micromachining workstations and production lines. Excimer Lasers Product Catalog 2011 Related Applications . -- Select a Related Application -- Activation of Dopants with UV Excimer Lasers Analysis of Solid Samples with the 193nm Excimer Laser Annealing
Related Searches: tunable uv laser | sequential lateral solidification | tunable excimer laser | cable marking

7pdf document  ExcimerProductGuide2011 Best match in this PDF  |  All matches in this PDF
…the LAMBDA SX 540C HPS are specially designed for Excimer Laser Annealing (ELA). The high quality demand in OLED display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can be created only with high performance excimer lasers. 3. Specifications1 LAMBDA SX 315C LAMBDA SX 540C…
Related Searches: excimer manual | premix gas | krf laser | excimer laser

8pdf document  LEAP Microprocessing Best match in this PDF  |  All matches in this PDF
excimer-laser based processing systems as well as of the large field size covered within each laser shot, excimer lasers are indispensable laser sources in pulsedlaser deposition, high-precision marking, low-temperature surface annealing and large-area micropatterning. The innovative potential of excimer
Related Searches: silicon annealing

9pdf document  LTPSWhitePaperFinal Oct28 Best match in this PDF  |  All matches in this PDF
…Initially, silicon annealing was performed by thermal processing; heating the panels to temperatures above 600°C. However, this technology, called High Temperature Poly-Silicon (HTPS), requires expensive heat-resistant substrates. In current LTPS mass production methods, a pulsed excimer laser line beam is…
Related Searches: lsx 300 | amoled | oled | mopa

10pdf document  ExcimerLaserSolutions Best match in this PDF  |  All matches in this PDF
…typically not laser experts and who want a simple, reliable turnkey tool." Fostering Industrial Reliability and Growth Coherent excimer lasers provide superior reliability and performance to a wide range of industrial markets. Our excimers are now the first choice in virtually every excimer application…
Related Searches: ela | ophthalmic lasers | excimer


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