1 - 10 of 103 Search Results for excimer laser annealing
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Silicon Annealing with Eximer Lasers
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Silicon Annealing with Eximer Lasers To make it easy for you to access a wide range of commercial applications using lasers, we have developed an Industrial Applications finder’s tool. Coherent lasers & silicon annealing Flat Panel Displays Monitors Active-Matrix Liquid Crystal Displays ...
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2.
Excimer
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Excimer Excimer lasers are the most powerful and versatile light sources in the UV range of the electromagnetic spectrum. Because of their cold ablation and short wavelength excimer lasers are used for countless applications. Office Locations To locate your nearest Coherent office for Eximer laser products ...
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3.
300WXeClExcimerLaserAnnealingRev2
(PAGE 2 OF 8)
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Figure 1: Principle of excimer laser annealing. The pulsed excimer laser beam is homogenized and shaped to a line and scanned across the surface. Within the laser pulse duration the amorphous silicon layer is rapidly heated and melted. As it cools down the recrystallization into polycrystalline silicon ...
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6.
Silicon Annealing with Excimer Lasers
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Silicon Annealing with Excimer Lasers To make it easy for you to access a wide range of commercial applications using lasers, we have developed an Industrial Applications finder’s tool. Coherent lasers & industrial laser applications Semiconductor Surface Modification NEW! Quick Application Finder ...
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7.
pdf_119
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... films that cannot be produced by the line beam method. However, James Im at Columbia University (New York, NY) has developed a new process called excimer laser-based sequential lateral solidification (SLS). [4,5] The SLS process improves upon the linebeam technique to yield homogeneous polysilicon films ...
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8.
300WXeClExcimerLaserAnnealingRev2
(PAGE 1 OF 8)
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300 W XeCl Excimer Laser Annealing and Sequential Lateral Solidification in Low Temperature Poly Silicon Technology Ludolf Herbst*a, Hans-Jürgen Kahlertb, Burkhard Fechnerc, Ulrich Rebhana, Rustem Osmanowa a Lambda Physik AG, Hans-Böckler-Strasse 12, D-37079 Göttingen, Germany; b MicroLas Lasersystem ...
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9.
interview
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INTERVIEW www.laser-journal.de LTJ 7© 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim Effectively delivering the next generation of UV laser solutions Interview with Tobias Damm, Managing Director of Coherent Lambda Physik GmbH Coherent has acquired and integrated several important companies in ...
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