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excimer attenuator

COHERENT LMC 2016-2017 Catalog .pdf

COHERENT LMC 2016-2017 Catalog .pdf

…profiling system are the camera itself, Coherent Beamview analysis software running on an appropriate computer and, when necessary, beam attenuation optics. The key choice to make is matching the appropriate camera technology to your application. Coherent beam diagnostic cameras are specifically…

Proofing-of-photolithographic-phase-shift-masks.pdf

Proofing-of-photolithographic-phase-shift-masks.pdf

coating material such as molybdenum silicide rather than chrome. The molybdenum silicide attenuates the light enough so that the intensity is not sufficient to expose the resist, but the layer still induces a phase shift of 180° relative to the clear fused silica areas. The resultant interference…

Proofing-of-photolithographic-phase-shift-masks.pdf

Proofing-of-photolithographic-phase-shift-masks.pdf

coating material such as molybdenum silicide rather than chrome. The molybdenum silicide attenuates the light enough so that the intensity is not sufficient to expose the resist, but the layer still induces a phase shift of 180° relative to the clear fused silica areas. The resultant interference…

Proofing-of-photolithographic-phase-shift-masks.pdf

Proofing-of-photolithographic-phase-shift-masks.pdf

coating material such as molybdenum silicide rather than chrome. The molybdenum silicide attenuates the light enough so that the intensity is not sufficient to expose the resist, but the layer still induces a phase shift of 180° relative to the clear fused silica areas. The resultant interference…

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