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excimer laser annealing

Case Study Excimer ELA 2018 English.pdf

Case Study Excimer ELA 2018 English.pdf

www.coherent.com | tech.sales@coherent.com | 800-527-3786 | 408-764-4983 Case Study: Excimer Laser Annealing for Brilliant AMOLED Displays Excimer laser annealing is key to mass production of polysilicon substrates for high-performance mobile displays. Vyper/LineBeam-technology supplies the global…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

coherent.com 27
VYPER
Very High-Power Excimer Lasers
The VYPER Series lasers are multiple beam very high-power excimer
lasers specially designed for Excimer Laser Annealing (ELA). The high
quality demand in high resolution mobile display manufacturing
requires high…

VYPER Series Lasers

VYPER Series Lasers

…Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit…

LineBeam systems

LineBeam systems

…Optical System 308 nm excimer laser annealing enables market growth of faster, brighter, thinner and more lightweight AM-LCD and AM-OLED flat panel devices relying on high electron mobility. Datasheet LineBeam Applications Application Process Material Excimer Laser Annealing Surface Modification…

LAMBDA SX Excimer Laser Series

LAMBDA SX Excimer Laser Series

…SX lasers are perfectly suited for applications ranging from microstructuring, advanced semiconductor packaging, manufacturing of high-temperature superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA).…

OLED Flexible Displays OPE2017 .pdf

OLED Flexible Displays OPE2017 .pdf

…examples include excimer lasers used for polysilicon annealing of display backplanes, and for laser lift-off to separate flexible display films from glass substrates. Other important applications are the use of ultra-short pulse (USP) lasers for circuit repair, both CO2 and USP lasers for film and…

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

…LEAP UVblade Excimer Laser Annealing Demand is rising for high definition and power efficient low temperature polysilicon (LTPS) display backplanes to be the foremost differentiator for mobile devices such as smartphones and tablets. LineBeam systems based on high power excimer lasers from Coherent…

COHR VarioLas DS 0418 7.pdf

COHR VarioLas DS 0418 7.pdf

…results · Modular design with tailored options for flexible use · Square beam and line beam fields for optimum results · Supports all COMPex laser models to enable efficient processing APPLICATIONS · Laser Lift-Off Separation · Dopant Ion Activation · Ablative Patterning · Excimer Laser Annealing

Microelectronics

Microelectronics

…to enable stable performance of AMLCD and AMOLED displays. Coherent is the market leader for excimer lasers and UV optical systems that are the enabling components of the annealing system. Highest laser power of more than 1 kW and optimized line beams of up to 750 mm are used worldwide for the…

Coherent

Coherent

…quarter fiscal 2014 orders were lower primarily due to timing of large excimer laser annealing orders.
In the second quarter of fiscal 2014, we received a large order from one customer for excimer laser
annealing systems for low-temperature polycrystalline silicon (LTPS) processing, some…

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…optics causes many potential applications to rely instead on 355-nm lasers optimized
for short pulse duration, which can produce similar results in many materials.
Excimers represent another important pulsed laser technology. They can produce several discrete wavelengths throughout…

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…