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excimer laser annealing

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

ILS Annealing.PDF

…temperature for this process is 600°C. This high temperature would damage standard glass substrates, and therefore necessitates the use of expensive, heat-resistant EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME RAINER PÄTZEL AND RALPH DELMDAHL Silicon annealing enables advanced displays

UV Processing Solutions

UV Processing Solutions

…Solutions Literature 2016 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End version UV Processing Solutions Wavelength (nm) Beam Geometry Approx. Beam Dimensions Approx. Energy Density Laser Options UV blade 308 Line…

LAMBDA SX

LAMBDA SX

…nm) to 600 Watts (308 nm only). The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing (ELA), industrial scale Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO), micro structuring, and all other applications which require high UV laser throughput. Model Name Wavelength (nm) Max.…

VYPER

VYPER

…Material Excimer Laser Annealing Semiconductor --> Features & Benefits VYPER/TwinVYPER Key Feature Customer Benefit Multi-Kilowatt Stabilized Output Power Fast, large area processing at lowest costs per Watt ExiScope Software (optional) Onboard logging and evaluation of laser parameters…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

COHR LAMBDASXseries 01-2016.pdf

COHR LAMBDASXseries 01-2016.pdf

…semiconductor packaging, manufacturing of High Temperature Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR.The E-series is specially designed for Excimer Laser Annealing (ELA). Superior Reliability & Performance www.Coherent.com/LAMBDASX_Series

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

Q3-16 Coherent Prepared Remarks.pdf

Q3-16 Coherent Prepared Remarks.pdf

…round of FPD annealing orders is developing as customers refine their market share assumptions and larger format displays gain traction. We are beginning to see orders for other process steps in OLED production including short-pulse lasers for film cutting and excimer lasers for laser lift-off. Semi…

LineBeam

LineBeam

LineBeam System for excimer laser crystallization annealing applications. LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates was transferred into industrial production in the mid-1990s. This technique is…

Photonics Spectra - September 2016

Photonics Spectra - September 2016

…Limits of Excimer Lasers: Annealing for Advanced Displays Tech Feature Images courtesy of Coherent Inc. High-power scaling for large format poly-Si annealing shown here with two dual-oscillator VYPER lasers, with all four beams merging into a 1300-mm length processing beam. Excimer lasers enable…

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