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excimer laser annealing

Case Study Excimer ELA 2018 English.pdf

Case Study Excimer ELA 2018 English.pdf

www.coherent.com | tech.sales@coherent.com | 800-527-3786 | 408-764-4983 Case Study: Excimer Laser Annealing for Brilliant AMOLED Displays Excimer laser annealing is key to mass production of polysilicon substrates for high-performance mobile displays. Vyper/LineBeam-technology supplies the global…

VYPER Series Lasers | Coherent

VYPER Series Lasers | Coherent

…Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high demand for high-resolution mobile display manufacturing requires high-grade low-temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit…

LineBeam systems | Coherent

LineBeam systems | Coherent

…Optical System 308 nm excimer laser annealing enables market growth of faster, brighter, thinner and more lightweight AM-LCD and AM-OLED flat panel devices relying on high electron mobility. Datasheet LineBeam Applications Application Process Material Excimer Laser Annealing Surface Modification…

LAMBDA SX Excimer Laser Series | Coherent

LAMBDA SX Excimer Laser Series | Coherent

…SX lasers are perfectly suited for applications ranging from microstructuring, advanced semiconductor packaging, manufacturing of high-temperature superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR. The E-Series is ideal for Excimer Laser Annealing (ELA).…

COHR ExcimerCatalog2019.pdf

COHR ExcimerCatalog2019.pdf

coherent.com 27
VYPER
Very High-Power Excimer Lasers
The VYPER Series lasers are multiple beam very high-power excimer
lasers specially designed for Excimer Laser Annealing (ELA). The high
quality demand in high resolution mobile display manufacturing
requires high…

Microelectronics

Microelectronics

…to enable stable performance of AMLCD and AMOLED displays. Coherent is the market leader for excimer lasers and UV optical systems that are the enabling components of the annealing system. Highest laser power of more than 1 kW and optimized line beams of up to 750 mm are used worldwide for the…

UV Processing Solutions

UV Processing Solutions

…VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). Excimer Lasers and Applications Literature 2019 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End…

UV Processing Solutions

UV Processing Solutions

…VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). UV Processing Solutions Literature 2019 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End version…

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

…Families Excimer Lasers & UV Beam Delivery Laser Machines and Systems Excimer Laser Annealing The challenge for Liquid crystal display (LCD) manufacturers is to produce higher performance displays, while simultaneously reducing cost and increasing display size. Excimer line beam annealing of…

Excimer Lasers & UV Beam Delivery

Excimer Lasers & UV Beam Delivery

…offered at 193 nm, 248 nm, and 308 nm. VYPER VYPER The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). Excimer Lasers and Applications Literature Excimer Catalog Related Materials Videos UVblade - Solutions for Flexible…

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

ILS Annealing.PDF

…This high
temperature would damage standard glass substrates, and
therefore necessitates the use of expensive, heat-resistant
EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME
RAINER PÄTZEL AND RALPH DELMDAHL
Silicon annealing enables
advanced displays

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