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excimer laser annealing

ILS Annealing.PDF

…temperature for this process is 600°C. This high temperature would damage standard glass substrates, and therefore necessitates the use of expensive, heat-resistant EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME RAINER PÄTZEL AND RALPH DELMDAHL Silicon annealing enables advanced displays

34706a cover.indd

34706a cover.indd

…California grows the aluminum-free materials that are incorporated into our semiconductor lasers. Our facility in Richmond, California manufactures large form factor optics for our Linebeam excimer laser annealing systems. We have transferred several products and subassemblies for manufacture at our…

LineBeam systems | Coherent

LineBeam systems | Coherent

…Optical System 308 nm excimer laser annealing enables market growth of faster, brighter, thinner and more lightweight AM-LCD and AM-OLED flat panel devices relying on high electron mobility. Datasheet LineBeam Applications Application Process Material Excimer Laser Annealing Surface Modification…

UV Processing Solutions

UV Processing Solutions

…VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). UV Processing Solutions Literature 2019 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End version…

Q3-16 Coherent Prepared Remarks.pdf

Q3-16 Coherent Prepared Remarks.pdf

…round of FPD annealing orders is developing as customers refine their market share assumptions and larger format displays gain traction. We are beginning to see orders for other process steps in OLED production including short-pulse lasers for film cutting and excimer lasers for laser lift-off. Semi…

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

…Families Excimer Lasers & UV Beam Delivery Laser Machines and Systems Excimer Laser Annealing The challenge for Liquid crystal display (LCD) manufacturers is to produce higher performance displays, while simultaneously reducing cost and increasing display size. Excimer line beam annealing of…

Photonics Spectra - September 2016

Photonics Spectra - September 2016

…Limits of Excimer Lasers: Annealing for Advanced Displays Tech Feature Images courtesy of Coherent Inc. High-power scaling for large format poly-Si annealing shown here with two dual-oscillator VYPER lasers, with all four beams merging into a 1300-mm length processing beam. Excimer lasers enable…

UV Processing Solutions

UV Processing Solutions

…VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). Excimer Lasers and Applications Literature 2019 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…(110.2x33.3x82in.) LAMBDA SX for Excimer Laser Annealing Excimer Lasers Key Features Customer Benefits · Best Pulse Stability · High annealing homogeneity · Stable Beam Parameter · High annealing yield 1 Allspecificationsaresubjecttochangewithoutpriornoticeinordertoprovidethebestproductpossible.…

COHR LAMBDASXseries 01-2016.pdf

COHR LAMBDASXseries 01-2016.pdf

…semiconductor packaging, manufacturing of High Temperature Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR.The E-series is specially designed for Excimer Laser Annealing (ELA). Superior Reliability & Performance www.Coherent.com/LAMBDASX_Series

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

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