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excimer laser annealing

UV Processing Solutions

UV Processing Solutions

…VYPER Excimer Lasers and Applications Literature 2016 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End version UV Processing Solutions Wavelength (nm) Beam Geometry Approx. Beam Dimensions Approx. Energy Density Laser

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

Laser Focus World - August 2016

Laser Focus World - August 2016

…LTPS display annealing Lambda Physik was one of the pioneers of excimer laser technology, and dominated early applications. The first significant one of these was eye surgery (LASIK), which continues to be the highest unit-volume application for excimers. Another important excimer industrial…

FutureElectronics June2014.pdf

FutureElectronics June2014.pdf

…groundbreaking Vyper/LineBeam technology, which enables the required large-format excimer laser annealing process of transforming amorphous silicon panels into high-grade LTPS panels. Technically, a 308nm excimer laser line beam is scanned over the substrate with the amorphous silicon layer on top,…

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

34706a cover.indd

34706a cover.indd

…California grows the aluminum-free materials that are incorporated into our semiconductor lasers. Our facility in Richmond, California manufactures large form factor optics for our Linebeam excimer laser annealing systems. We have transferred several products and subassemblies for manufacture at our…

Prepared Remarks Q214 Conference Call v3.pdf

Prepared Remarks Q214 Conference Call v3.pdf

…promising results at a major chip manufacturer. As discussed during last quarter's conference call, we received a record order for excimer laser annealing laser systems for LTPS processing. The bulk of this order including the more advanced triple VyperTM/Linebeam 1500s will ship in fiscal 2015.…

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

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