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excimer laser annealing

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

ILS Annealing.PDF

…temperature for this process is 600°C. This high temperature would damage standard glass substrates, and therefore necessitates the use of expensive, heat-resistant EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME RAINER PÄTZEL AND RALPH DELMDAHL Silicon annealing enables advanced displays

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

ILS Annealing.PDF

…method that emerged was LTPS annealing (FIGURE 1). In this technique, a pulsed excimer laser line beam is scanned over the a-Si film. Silicon efficiently absorbs the 308nm excimer output. This high absorption, combined with the high pulse energy of the excimer laser, makes it possible to achieve…

ILS Annealing.PDF

…method that emerged was LTPS annealing (FIGURE 1). In this technique, a pulsed excimer laser line beam is scanned over the a-Si film. Silicon efficiently absorbs the 308nm excimer output. This high absorption, combined with the high pulse energy of the excimer laser, makes it possible to achieve…

ILS Annealing.PDF

…of excimer lasers to produce high-energy UV pulses is also benefiting other applications in displays and microelectronics manufacturing. For example, excimer lasers are used in mask-based direct patterning of microcircuits for cost-sensitive applications like medical disposables. Here, the excimer

ILS Annealing.PDF

…of excimer lasers to produce high-energy UV pulses is also benefiting other applications in displays and microelectronics manufacturing. For example, excimer lasers are used in mask-based direct patterning of microcircuits for cost-sensitive applications like medical disposables. Here, the excimer

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