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excimer laser annealing

Laser Focus World - August 2016

Laser Focus World - August 2016

…LTPS display annealing Lambda Physik was one of the pioneers of excimer laser technology, and dominated early applications. The first significant one of these was eye surgery (LASIK), which continues to be the highest unit-volume application for excimers. Another important excimer industrial…

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

Excimer Lasers & UV Beam Delivery

Excimer Lasers & UV Beam Delivery

…308 nm. Data Sheet VarioLas VYPER VYPER The VYPER Series lasers are multiple beam, very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). Data Sheet VYPER Excimer Lasers and Applications Literature Excimer Catalog Related Materials Videos UVblade - Solutions for…

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

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