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excimer laser annealing

34706a cover.indd

34706a cover.indd

…grows the
aluminum-free materials that are incorporated into our semiconductor lasers. Our facility in Richmond,
California manufactures large form factor optics for our Linebeam excimer laser annealing systems. We
have transferred several products and subassemblies for manufacture…

Photonics Spectra - October 2016

Photonics Spectra - October 2016

…conformable subaperture tools.
· Better molding of IR materials.
·
Improvements in critical line beam
shaping optics for excimer laser annealing tools for display fabrication.
Freeform optics
Aspheric/freeform optics manufacturing has become a main theme in the optics…

OLED Flexible Displays OPE2017 .pdf

OLED Flexible Displays OPE2017 .pdf

…examples include excimer lasers used for polysilicon annealing of display backplanes, and for laser lift-off to separate flexible display films from glass substrates. Other important applications are the use of ultra-short pulse (USP) lasers for circuit repair, both CO2 and USP lasers for film and…

32311a coverSinglesRR.indd

32311a coverSinglesRR.indd

…processes, such as excimer laser annealing (``ELA'') have allowed high-volume production of
low-temperature polysilicon (``LTPS'') on conventional glass substrates. Our excimer lasers provide a
unique solution for LTPS because they are the only industrial-grade excimer lasers with the high…

COHR MaterialsProcessingBrochure 0816revA 3.pdf

COHR MaterialsProcessingBrochure 0816revA 3.pdf

Laser crystallized polysilicon
also provides the stability required to drive OLED displays. Depending on the materi
als and layer structure of the thin films, different
laser wavelengths, pulse widths and power levels are used.The VYPER
excimer laser is our"workhorse" to anneal

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…optics causes many potential applications to rely instead on 355-nm lasers optimized
for short pulse duration, which can produce similar results in many materials.
Excimers represent another important pulsed laser technology. They can produce several discrete wavelengths throughout…

07(IK14-10)p.53-57.fm

07(IK14-10)p.53-57.fm

laser offering deep ultraviolet output; in laser material processing,
power translates directly into throughput. The excimer is an
industry-proven, 24/7 workhorse, both at lower levels for
microlithography of ICs, and at kilowatt power levels for
low temperature annealing of…

Industrial Photonics - April 2016

Industrial Photonics - April 2016

…and organic materials.
Coherent Inc.
Process
Laser Type
DPSS
Pulsed (ns)
DPSS Pulsed
(Ultrafast)
CO
2
Excimer Fiber Direct Diode
Thin-Film Scribing
· · ·
Silicon Annealing
·
Cutting
· · · ·
Converting
· ·

Meterless-Laser-Energy-Measurement-Concept-Lowers-Cost-and-Simplifies-Integration FORMFIRST.pdf

Meterless-Laser-Energy-Measurement-Concept-Lowers-Cost-and-Simplifies-Integration FORMFIRST.pdf

…a consumer may purchase one or more sensor heads, each optimized for a different type of power measurement (e.g. deep UV excimer lasers, high energy Nd:YAG lasers, etc.). These are then mated with meter instrumentation that is obtained separately. Here, again, the consumer has a wide choice…

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