www.coherent.com | firstname.lastname@example.org | 800-527-3786 | 408-764-4983 Case Study: Excimer Laser Annealing for Brilliant AMOLED Displays Excimer laser annealing is key to mass production of polysilicon substrates for high-performance mobile displays. Vyper/LineBeam-technology supplies the global…
Very High-Power Excimer Lasers
The VYPER Series lasers are multiple beam very high-power excimer
lasers specially designed for Excimer Laser Annealing (ELA). The high
quality demand in high resolution mobile display manufacturing
…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor . Nowadays, all excimer lasers at…
temperature would damage standard glass substrates, and
therefore necessitates the use of expensive, heat-resistant
EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME
RAINER PÄTZEL AND RALPH DELMDAHL
Silicon annealing enables
…lasers are multiple beam very high-power excimer lasers specially designed for Excimer Laser Annealing (ELA). The high quality demand in high resolution mobile display manufacturing requires high grade low temperature poly-Silicon (LTPS) which can be created only with excimer lasers. The lasers fit…
…in producing excimer lasers for industrial and scientific
applications. Here we interview company General Manager Richard Waldermann on the current state of excimer lasers and their future prospects.
Keywords: Excimer Laser, ELA - Excimer Laser Annealing, LLO - Laser Lift-Off, LASIK…
die ELA (Excimer Laser Annealing) Anwendung
für den Display-Markt geprägt."
krotechnik, Displays, Biotechnologie
und Energietechnik. Wenn man das
Verkaufsvolumen betrachtet, ist der
größte Anteil durch die ELA (Excimer
Laser Annealing) Anwendung für den
…production: Laser Lift-Off (LLO) to separate the finished LED from the sapphire growth wafer Laser Induced Forward Transfer (LIFT) to move the LED from a donor to the substrate Excimer Laser Annealing (ELA) to fabricate a LTPS-TFT backplane Laser cutting at different levels of aggregation Laser…
…deliver these kinds of benefits.
The ideal laser for LTPS annealing produces high energy and UV pulses, and has
an output beam conducive for shaping
into a long, thin line. But this technology
congruence for our particular excimer lasers was just the starting point. In fact, it…
…results · Modular design with tailored options for flexible use · Square beam and line beam fields for optimum results · Supports all COMPex laser models to enable efficient processing APPLICATIONS · Laser Lift-Off Separation · Dopant Ion Activation · Ablative Patterning · Excimer Laser Annealing
…into poly-Si by heating it with the excimer laser
in a process called excimer laser annealing (ELA; see Fig. 3). Specifically, a pulsed
excimer laser line beam is scanned over
the a-Si film, which efficiently absorbs the
308 nm excimer output.
This high absorption, combined…
…beam utilization · Proven performance in leading large-scale OLED and LCD fabs · Active control and observation modules for reproducible annealing results · Line beam lengths scalable up to Gen 10.5 panel size APPLICATIONS · Excimer Laser Annealing (ELA) of polysilicon backplanes for OLED and LCD
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