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excimer laser annealing

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

FutureElectronics June2014.pdf

FutureElectronics June2014.pdf

…groundbreaking Vyper/LineBeam technology, which enables the required large-format excimer laser annealing process of transforming amorphous silicon panels into high-grade LTPS panels. Technically, a 308nm excimer laser line beam is scanned over the substrate with the amorphous silicon layer on top,…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

…(110.2x33.3x82in.) LAMBDA SX for Excimer Laser Annealing Excimer Lasers Key Features Customer Benefits · Best Pulse Stability · High annealing homogeneity · Stable Beam Parameter · High annealing yield 1 Allspecificationsaresubjecttochangewithoutpriornoticeinordertoprovidethebestproductpossible.…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

Microsoft Word - e-newsletter Whitepaper FPD-rev2.docx

Microsoft Word - e-newsletter Whitepaper FPD-rev2.docx

…become the mainstream and is standardly based on excimer laser annealing (ELA). Current 308 nm excimer laser annealing systems have been upscaled to support glass substrates up to Gen 8 panel size. Excimer Laser Annealing Excimer Laser Annealing (ELA) is a key process step for converting the…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com36 LineBeam Systems for Excimer Laser Annealing TwinVYPER excimer laser with LB1300 beam delivery LaserSelectionGuideApplicationsExcimerLasersCustomerSupportLMCAccessoriesUVOpticalSystems…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

ILS Annealing.PDF

…temperature for this process is 600°C. This high temperature would damage standard glass substrates, and therefore necessitates the use of expensive, heat-resistant EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME RAINER PÄTZEL AND RALPH DELMDAHL Silicon annealing enables advanced displays

ILS Annealing.PDF

…temperature for this process is 600°C. This high temperature would damage standard glass substrates, and therefore necessitates the use of expensive, heat-resistant EXCIMER LASER ANNEALING ALLOWS PRODUCTION AT HIGH VOLUME RAINER PÄTZEL AND RALPH DELMDAHL Silicon annealing enables advanced displays

34706a cover.indd

34706a cover.indd

…California grows the aluminum-free materials that are incorporated into our semiconductor lasers. Our facility in Richmond, California manufactures large form factor optics for our Linebeam excimer laser annealing systems. We have transferred several products and subassemblies for manufacture at our…

Q3-16 Coherent Prepared Remarks.pdf

Q3-16 Coherent Prepared Remarks.pdf

…round of FPD annealing orders is developing as customers refine their market share assumptions and larger format displays gain traction. We are beginning to see orders for other process steps in OLED production including short-pulse lasers for film cutting and excimer lasers for laser lift-off. Semi…

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