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excimer laser annealing

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

FutureElectronics June2014.pdf

FutureElectronics June2014.pdf

…groundbreaking Vyper/LineBeam technology, which enables the required large-format excimer laser annealing process of transforming amorphous silicon panels into high-grade LTPS panels. Technically, a 308nm excimer laser line beam is scanned over the substrate with the amorphous silicon layer on top,…

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

LTJ Excimer 0607.pdf

LTJ Excimer 0607.pdf

…energy stability. From an economic standpoint, the excimer laser source also needs to operate with high reliability to minimize production line downtime. The unique Lambda SX series of excimer lasers developed for 24/7 silicon annealing are now enabling other novel high-throughput industrial…

50th-Laser-Anniversary-Annealing.pdf

50th-Laser-Anniversary-Annealing.pdf

…televisions. In the low-temperature annealing of polysilicon, excimer lasers with UV output energies of over 1 J per pulse and output powers of 600 W are used to manufacture liquid-crystal and organic LED backplanes at a rate of 100 cm2 s-1 . The excimer laser is also used in the precision machining…

Analytical Characterization of CFRP Laser Treated by Excimer Laser Radiation

Analytical Characterization of CFRP Laser Treated by Excimer Laser Radiation

…corresponding to 600 W are provided high power excimer lasers used in 24/7 poly-silicon annealing of LCD and OLED backplanes at a rate of 100 cm2 per second in flat panel display production. Thousands of air-cooled, table-top excimer lasers form the backbone of LASIK vision correction systems…

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