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excimer laser annealing

Excimer laser technology trends

Excimer laser technology trends

…W excimer laser for large-area thin-film annealing was built. The replacement of thyratron switches by its maintenance-free solid-state based counterparts laid the groundwork for the ongoing success of high power excimer lasers on the industrial production floor [2]. Nowadays, all excimer lasers at…

VYPER

VYPER

…Material Excimer Laser Annealing Semiconductor --> Features & Benefits VYPER/TwinVYPER Key Feature Customer Benefit Multi-Kilowatt Stabilized Output Power Fast, large area processing at lowest costs per Watt ExiScope Software (optional) Onboard logging and evaluation of laser parameters…

COHR ExcimerCatalog2016revA 1.pdf

COHR ExcimerCatalog2016revA 1.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

Photonics Spectra - September 2016

Photonics Spectra - September 2016

…Limits of Excimer Lasers: Annealing for Advanced Displays Tech Feature Images courtesy of Coherent Inc. High-power scaling for large format poly-Si annealing shown here with two dual-oscillator VYPER lasers, with all four beams merging into a 1300-mm length processing beam. Excimer lasers enable…

COHR LAMBDASXseries 01-2016.pdf

COHR LAMBDASXseries 01-2016.pdf

…semiconductor packaging, manufacturing of High Temperature Superconductors by Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO) to high power UV LIDAR.The E-series is specially designed for Excimer Laser Annealing (ELA). Superior Reliability & Performance www.Coherent.com/LAMBDASX_Series

UV Processing Solutions

UV Processing Solutions

…VYPER Excimer Lasers and Applications Literature 2016 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End version UV Processing Solutions Wavelength (nm) Beam Geometry Approx. Beam Dimensions Approx. Energy Density Laser

UV Processing Solutions

UV Processing Solutions

…Solutions Literature 2016 Excimer Lasers / UV Optical Systems Catalog Related Materials Videos VYPER and LineBeam System for Laser Annealing UVBlade End version UV Processing Solutions Wavelength (nm) Beam Geometry Approx. Beam Dimensions Approx. Energy Density Laser Options UV blade 308 Line…

Excimer laser technology trends

Excimer laser technology trends

…achieved with commercial 308 nm excimer laser technology have been constantly increasing over the course of the last three decades by two orders of magnitude, as can be seen in figure 6. The power roadmap has been largely driven by the thinfilm silicon annealing market. Since 2010, it extends up…

Laser Focus World - August 2016

Laser Focus World - August 2016

…LTPS display annealing Lambda Physik was one of the pioneers of excimer laser technology, and dominated early applications. The first significant one of these was eye surgery (LASIK), which continues to be the highest unit-volume application for excimers. Another important excimer industrial…

COHR ExcimerCatalog2016revC.pdf

COHR ExcimerCatalog2016revC.pdf

Superior Reliability & Performance · www.Coherent.com · tech.sales@coherent.com26 LAMBDA SX for Excimer Laser Annealing Excimer Lasers LaserSelectionGuideApplicationsUVOpticalSystemsCustomerSupportLMCAccessoriesExcimerLasers TheLAMBDASXE-Seriesisspeciallydesignedfor…

LineBeam

LineBeam

LineBeam System for excimer laser crystallization annealing applications. LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates was transferred into industrial production in the mid-1990s. This technique is…

LAMBDA SX

LAMBDA SX

…nm) to 600 Watts (308 nm only). The LAMBDA SX lasers are perfectly suited for Excimer Laser Annealing (ELA), industrial scale Pulsed Laser Deposition (PLD), Laser Lift-Off (LLO), micro structuring, and all other applications which require high UV laser throughput. Model Name Wavelength (nm) Max.…

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