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excimer laser crystallization

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

LineBeam

LineBeam

LineBeam System for excimer laser crystallization annealing applications. LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates was transferred into industrial production in the mid-1990s. This technique is…

Laser Focus World - November 2017

Laser Focus World - November 2017

excimer lasers. Both 248 and 193 nm lasers are used for photolithography. In particular, 193 nm excimer lasers enable circuit pattern features down to 10 nm, which is far below the diffraction limit. Achieving this necessitated the development of highly specialized excimers with grating-controlled…

Materials Processing & Industrial Applications

Materials Processing & Industrial Applications

…Product Families Excimer Lasers & UV Beam Delivery Laser Tools and Systems Excimer Laser Annealing The challenge for Liquid crystal display (LCD) manufacturers is to produce higher performance displays, while simultaneously reducing cost and increasing display size. Excimer line beam annealing…

Microelectronics

Microelectronics

…The Coherent Paladin family of lasers is the ideal source for LDI. Related Products Paladin Advanced 355 Paladin Advanced 532 Paladin Compact 355 Laser Crystallization for LTPS Laser crystallization drives faster, brighter displays with HD resolution. Excimer laser powers in excess of 1 kW and high…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…the excimer laser line beam of a 308 nm wavelength is shown through the carrier glass substrate on the polymer. Only the polymer in the direct vicinity of the glass substrate is evaporated, as illustrated in Figure 2. LLO separation using the 308 nm excimer laser occurs within a single laser pulse…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…the excimer laser line beam of a 308 nm wavelength is shown through the carrier glass substrate on the polymer. Only the polymer in the direct vicinity of the glass substrate is evaporated, as illustrated in Figure 2. LLO separation using the 308 nm excimer laser occurs within a single laser pulse…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…the excimer laser line beam of a 308 nm wavelength is shown through the carrier glass substrate on the polymer. Only the polymer in the direct vicinity of the glass substrate is evaporated, as illustrated in Figure 2. LLO separation using the 308 nm excimer laser occurs within a single laser pulse…

Laser activated vapour phase processes.qxd

Laser activated vapour phase processes.qxd

…defects in the crystal reduce the carrier lifetime, the breakdown behavior can be used to derive the crystal quality. The TBDs fabricated on the cleaned wafers showed a behavior similar to those expectable from defect free, i. e. ideal, layers. The decoupled combination of an Excimer Laser with an…

COHR MaterialsProcessingBrochure 0816revA 3.pdf

COHR MaterialsProcessingBrochure 0816revA 3.pdf

…sensors, IGBT, 3-D integration and more. Excimer lasers are widely adopted for the crystallization of amorphous silicon films used to form the polysilicon layers that provide the electrical functionality for high resolution displays. Laser crystallized polysilicon also provides the stability…

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