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excimer laser crystallization

32311a coverSinglesRR.indd

32311a coverSinglesRR.indd


additive manufacturing Semiconductor
Laser Machine Tools Ultrafast
Laser marking and coding CO2
DPSS
Ultrafast
Non-metal cutting, drilling CO, CO2
DPSS
Ultrafast
Excimer
Semiconductor
Laser Machine Tools
OEM components and instrumentation…

34706a cover.indd

34706a cover.indd

…displays on plastic substrates. Our excimer lasers provide a unique solution for LTPS because they are
the only industrial-grade excimer lasers optimized for this application. The current state-of-the-art
product for this application is our excimer VYPER laser, which delivers over 1000W of…

The PCB Magazine, November 2015

The PCB Magazine, November 2015

…Coherent is able to
supply UV lasers with up to
40W of power that operate for
more than 10,000 hours without a crystal change, which is
more than sufficient for current microelectronics processing tasks.
Excimer Lasers
Excimer lasers are another, even deeper UV source…

Coherent

Coherent

lasers, fiber lasers and ultrafast scientific lasers are
manufactured at our Santa Clara, California site. Our laser diode module products, laser
instrumentation products, test and measurement equipment products are manufactured in Wilsonville,
Oregon. We manufacture exotic crystals

ILS Annealing.PDF

…308nm excimer output. This high absorption, combined with
the high pulse energy of the excimer laser, makes it possible
to achieve near-complete melt of the thin silicon layer with just
a few pulses. This near-complete melt is essential to achieve
the optimum crystal formation…

07(IK14-10)p.53-57.fm

07(IK14-10)p.53-57.fm

…and T. Kuntze, "Drilling of
glass by excimer laser mask projection technique", Journal of
Laser Application., 12, 189 (2000).
5. R. Bengtsson, D. Mller and B. Klimt, "Picosecond lasers
come of age for micromachining", Industrial Laser Solutions.,
28(3), 15 (2013).
6.…

Meterless-Laser-Energy-Measurement-Concept-Lowers-Cost-and-Simplifies-Integration FORMFIRST.pdf

Meterless-Laser-Energy-Measurement-Concept-Lowers-Cost-and-Simplifies-Integration FORMFIRST.pdf

…Introduction and Overview Laser energy measurement specifically refers to quantifying the total energy contained in a single laser pulse, or train of laser pulses. Most commonly, this is accomplished with a pyroelectric detector, which is based on a ferroelectric crystal having a permanent…

Photonik Feb2014.pdf

Photonik Feb2014.pdf

…as 150µm are achieved.
Conclusion
Laser lift-off has firmly established itself
as a key technology for gentle substrate
separation in the manufacturing of sensitive microelectronic devices with low overall
height. Excimer lasers provide the necessary
pulse energies in…

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