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excimer laser crystallization

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer laser technology trends

Excimer laser technology trends

…As a matter of fact, a modern excimer laser in a PLD laboratory offers lower running costs at superior performance compared with a crystal and flash-lamp-consuming, frequency-converted Nd : YAG system [7]. 2.2. Energy control and stabilization Excimer lasers for PLD must meet high standards…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…the excimer laser line beam of a 308 nm wavelength is shown through the carrier glass substrate on the polymer. Only the polymer in the direct vicinity of the glass substrate is evaporated, as illustrated in Figure 2. LLO separation using the 308 nm excimer laser occurs within a single laser pulse…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…the excimer laser line beam of a 308 nm wavelength is shown through the carrier glass substrate on the polymer. Only the polymer in the direct vicinity of the glass substrate is evaporated, as illustrated in Figure 2. LLO separation using the 308 nm excimer laser occurs within a single laser pulse…

Excimer LLO 2014.pdf

Excimer LLO 2014.pdf

…the excimer laser line beam of a 308 nm wavelength is shown through the carrier glass substrate on the polymer. Only the polymer in the direct vicinity of the glass substrate is evaporated, as illustrated in Figure 2. LLO separation using the 308 nm excimer laser occurs within a single laser pulse…

Laser Focus World - November 2017

Laser Focus World - November 2017

excimer lasers. Both 248 and 193 nm lasers are used for photolithography. In particular, 193 nm excimer lasers enable circuit pattern features down to 10 nm, which is far below the diffraction limit. Achieving this necessitated the development of highly specialized excimers with grating-controlled…

Laser activated vapour phase processes.qxd

Laser activated vapour phase processes.qxd

…defects in the crystal reduce the carrier lifetime, the breakdown behavior can be used to derive the crystal quality. The TBDs fabricated on the cleaned wafers showed a behavior similar to those expectable from defect free, i. e. ideal, layers. The decoupled combination of an Excimer Laser with an…

COHR MaterialsProcessingBrochure 0816revA 3.pdf

COHR MaterialsProcessingBrochure 0816revA 3.pdf

…sensors, IGBT, 3-D integration and more. Excimer lasers are widely adopted for the crystallization of amorphous silicon films used to form the polysilicon layers that provide the electrical functionality for high resolution displays. Laser crystallized polysilicon also provides the stability…

COHR MaterialsProcessingBrochure 0816revA 3.pdf

COHR MaterialsProcessingBrochure 0816revA 3.pdf

…sensors, IGBT, 3-D integration and more. Excimer lasers are widely adopted for the crystallization of amorphous silicon films used to form the polysilicon layers that provide the electrical functionality for high resolution displays. Laser crystallized polysilicon also provides the stability…

COHR MaterialsProcessingBrochure 0816revA 3.pdf

COHR MaterialsProcessingBrochure 0816revA 3.pdf

…sensors, IGBT, 3-D integration and more. Excimer lasers are widely adopted for the crystallization of amorphous silicon films used to form the polysilicon layers that provide the electrical functionality for high resolution displays. Laser crystallized polysilicon also provides the stability…

Lasers | Photonics Handbook®

Lasers | Photonics Handbook®

…modifies the crystal refractive index and alters the polarization of the incoming light; an appropriate combination of polarization-sensitive optics can be placed in the cavity to prevent light of altered polarization from circulating. Other types of lasers, such as excimer lasers, do not require…

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