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Related Categories: Line Beam 1300 | Excimer Laser | Ela | Laser Annealing | Oled

excimer laser crystallization

LineBeam

LineBeam

LineBeam System for excimer laser crystallization annealing applications. LineBeam for Excimer Laser Annealing (ELA) of typically 50 nm to 120 nm thick amorphous silicon films on large flat panel display glass substrates was transferred into industrial production in the mid-1990s. This technique is…

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